National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India Clean room administrative committee Meeting TUMS Murthy Jan 29 , 2013 TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Action Points Sl.No Item Owner Status 1 a. To invite Chandrasekhar for the fire drill at CeNSE and seek his help for demonstrating fire fighting equipments b. To check with the original manufacturer of the sensors for the exact cost. c. To provide a statistics on the annual downtime for cleanroom Dr TUMS Murthy Done 2 All the alarms installed to be checked on Friday 11th Jan 2013 with the help of third party Mr.Adinarayana Murthy 3 To solve the issue for Tecport sputter 2 Dr.Vijayaraghavan/Prof Anilkumar 4 a. To include Anelva RF sputtering usage statistics also. b. To include a slide about the industry users using the cleanroom c. To provide a report on the Oxford workshop held at CeNSE Dr.Vijayaraghavan 5 a. To include EVG bonder usage statistics also. b. To provide a report on the Lithography workshop held at CeNSE c. To check if litho wet benches can be delivered by next week. d. To update the trend charts with the latest data. Dr.Gopal Hegde a. Done b. Done c. To be supplied next week. Invoice received. d. Being Done TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Action Points Sl.No Item Owner Status 6 To make a database of the industry users using our facilities at CeNSE Dr.Sanjiv Shrivastava Done along with Dr.Girish Kunte 7 To correct the number of hits on twiki page Sreelekshmy Ongoing. Alternate solution: Another plugin for Usage statistics available. In the process of installing it. 8 a. To add a poster with the list of names of industries that has been using the facility b. To provide an update on the income from industry users and to give a projection on the expected usage for next year. Dr.Girish Kunte a. b. Done TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Operations Issue of training new users raised by Profs. Ambarish and Manoj Varma Training slots are being reserved for equipment having high demand New users encouraged to observe operation of equipment outside their slots Independent users not allowed to book more than a specified number of slots during normal shift Manual control, feature not automated TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Operations Clean room AMC implementation has started PCW line in the clean room showing signs of rusting at welded joints on the outside. Nano Clean ( Madhu & Co) asked to come up with solutions Proposal for passivation and biocidal treatment of PCW line has been requested from NALCO, a well know company of water treatment and distribution. TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Fire Drill Fire safety and Evacuation exercise was conducted on 24th Jan. Lessons learnt PA systems of Cleanroom and Nano building need linking Alarm as well as announcements were not audible in many places Safety sweep of the building involved more than 10 people. Need strategy to tackle emergencies at night External agencies’ involvement to be worked out Fire fighting ring is yet to be handed over to institute (CCMD ??) TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Other issues Previous proposal for Medical Insurance to NNfC, MNCF and other project employees not approved. What next ?? TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Nitrogen Consumption Current status Liquid N2 consumption = 1129 litres/day . Equivalent Gas 800 m3 /day Used as Liquid N2 = 20 litres/day ( ~ 14 m3/day) Estimated usage by equipment = 700 m3/day ( To be validated) Unaccounted 100 m3/day, equal to 140 litres/day TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Nitrogen consumption Total consumption 800 m3/day Major users are Dry etch 60 m3 Diffusion 80 m3 Litho 20 m3 Thin films 45 m3 N2 Guns 25 m3 Gas cabinets 400 m3 Others 70 m3 TUMS Murthy Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting Nitrogen consumption Gas Cabinet consumption has to be reduced or eliminated Reduced gas cabinet flow to 30 liters/min from 40 Saving 100 m3/day = 140 litres/day (verified) Change alarm setting to reduce the flow further as a first step Replace Nitrogen with CDA as a next step. TUMS Murthy Cleanroom Admin Commitee Meeting