A Stress Analysis of Sputter Coating on the LSST Primary-Tertiary Mirror Substrate temperature and strain during sputter deposition of aluminum on cast.

Slides:



Advertisements
Similar presentations
Thermo-compression Bonding
Advertisements

Investigation of Proton Irradiation-Induced Creep of Ultrafine Grain Graphite Anne A. Campbell & Gary S. Was University of Michigan Research Supported.
MPA 2010, Braga HIGH VACUUM PLANTS FOR REACTIVE SPUTTER DEPOSITION OF MULTI-LAYER STACKS Milko Angelov Milko Angelov Consulting Co Ltd., Plovdiv, Bulgaria.
Radiopharmaceutical Production Target Foil Characteristics STOP.
ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May 1, 2013.
Chun-Chieh Lu Carbon-based devices on flexible substrate 1.
ME 388 – Applied Instrumentation Laboratory Fatigue Lab.
Hollow core planar waveguides and multilayers Prof. M. Skorobogatiy, review for the course ‘Introduction to Photonic Crystals’ École Polytechnique de Montréal.
Silicon Wafer Cleaning for EUV Reflectance Measurements by Cold, High-Pressure CO 2 Jet William Evans Brigham Young University.
Observational techniques meeting #3. Mirrors Classical mirrors: polished glass Monolithic block of glass, polished to spec. Largest good one is the 200”
1 WIREBONDING CHARACTERIZATION AND OPTIMIZATION ON THICK FILM SU-8 MEMS STRUCTURES AND ACTUATORS LIGA and Biophotonics Lab NTHU Institute of NanoEngineering.
Physical and Mechanical Characteristics of Pb-free Solder - Copper Joints Project funded by OFES (Switzerland) Within the framework of :Cost Action 531:
Dean R Walters Chamber and Bellows Jan. 5, Summary Chamber The plan is to construct a chamber made of 316LN stainless steel with.
UV laser-induced damage to grazing- incidence metal mirrors M. S. Tillack, J. Pulsifer, K. Sequoia 4th US-Japan Workshop on Laser-Driven Inertial Fusion.
Mechanical characterization of lead- free solder joints J. Cugnoni*, A. Mellal*, Th. J. Pr. J. Botsis* * LMAF / EPFL EMPA Switzerland.

Unsteady Heat Transfer in Semi-infinite Solids Solidification process of the coating layer during a thermal spray operation is an unsteady heat transfer.
Research & Development
Solar Cell conductive grid and back contact
Computational Nano & Micro Mechanics Laboratory UCLA Measurement of Tungsten Armor - Ferritic Steel Interfacial Bond Strength Using a Nanosecond Laser.
Requirements for Multi-layer Insulation (MLI) in the LCGT Cryostat
Silver / Polystyrene Coated Hollow Glass Waveguides for the Transmission of Visible and Infrared Radiation Carlos M. Bledt a and James A. Harrington a.
Alban REMILLIEUX3 rd ILIAS-GW Annual General Meeting. London, October 26 th -27 th, New coatings on new substrates for low mechanical loss mirrors.
Andrew Jacquier Brigham Young University
Telescopes & recent observational techniques ASTR 3010 Lecture 4 Chapters 3 & 6.
October 30th, 2007High Average Power Laser Program Workshop 1 Long lifetime optical coatings for 248 nm: development and testing Presented by: Tom Lehecka.
SEMINAR ON IC FABRICATION MD.ASLAM ADM NO:05-125,ETC/2008.
Solar Cells Typically 2 inches in diameter and 1/16 of an inch thick Produces 0.5 volts, so they are grouped together to produce higher voltages. These.
Thermal noise from optical coatings Gregory Harry Massachusetts Institute of Technology - on behalf of the LIGO Science Collaboration - 25 July
The investigation of optical inhomogeneities of the multilayer mirrors progress report Moscow State University Bilenko I.A
1 Confidential Proprietary Application of layers with internal stress for silicon wafer shaping J. Šik 1, R. Lenhard 1, D. Lysáček 1, M. Lorenc 1, V. Maršíková.
Temperature Sensitive Micro-electro-mechanical Systems Amy Kumpel Richard Lathrop John Slanina Haruna Tada Tufts University TAMPL REU 1999.
12/12/2014L. Proserpio – AXRO meeting, Prague  Definition of terms  Description of the problem wrt the x-ray thin mirrors technologies.
SUSPENSION DESIGN FOR ADVANCED LIGO: Update on GEO Activities Norna A Robertson University of Glasgow for the GEO 600 suspension team LSC Meeting, Hanford.
FVTX substrate FEA1 FVTX Substrate FEA C. M. Lei March 02, 2006.
Low temperature dissipation in coating materials S. Reid 1, I. Martin 1, H. Armandula 3, R. Bassiri 1, E. Chalkley 1 C. Comtet 4, M.M. Fejer 5, A. Gretarsson.
THE CRAO'S CONTRIBUTION FOR THE WSO / UV PROJECT N.V.STESHENKO.
S. Girshick, U. Minnesota Aluminum Nanoparticle Synthesis and Coating Steven L. Girshick University of Minnesota.
XFEL-INJ1/2 DUMPS Remarks / Requirements, Injector Beam Dynamic Review Meeting, DESY, Mon. 23. October 2006 ‹#› XFEL - INJ 1/2.
The tungsten/F82H sample was impinged at 6 different locations with 6 different laser fluence energies to determine the critical energy that would result.
Thermoelastic dissipation in inhomogeneous media: loss measurements and thermal noise in coated test masses Sheila Rowan, Marty Fejer and LSC Coating collaboration.
Atomic Layer Deposition for Microchannel Plates Jeffrey Elam Argonne National Laboratory September 24, 2009.
From: S.Y. Hu Y.C. Lee, J.W. Lee, J.C. Huang, J.L. Shen, W.
Solar Cells need a top side conductor to collect the current generated They also need a conductive film on the backside.
Atomic Layer Deposition for Microchannel Plate Fabrication at Argonne
Titanium Nitride Coating by Reactive DC Magnetron Sputtering as a Multipactor Suppressor on Coupler RF Ceramic Windows Walid KAABI Anti e - Cloud Coatings-
Influence of deposition conditions on the thermal stability of ZnO:Al films grown by rf magnetron sputtering Adviser : Shang-Chou Chang Co-Adviser : Tien-Chai.
NCSX 1 CTD Test Results Kalish 11/30/04. NCSX 2 The Issue The Winding Pack (WP) insulation (pre- impregnated S-2 glass with co-wound polyimide film) has.
Progress and Paper report Sept 23, Progress SPP Manuscript was accepted SPP Manuscript was accepted Evaporation of a multilayer coating with low.
UV Laser-Induced Damage to Grazing Incidence Metal Mirrors M. S. Tillack, J. E. Pulsifer, K. Sequoia Mechanical and Aerospace Engineering Department and.
Design and Testing of a Silicon Suspension A. Cumming 1, G. Hammond 1, K. Haughian 1, J. Hough 1, I. Martin 1, R. Nawrodt 2, S. Rowan 1, C. Schwarz 2,
The coating thermal noise R&D for the 3rd generation: a multitechnique investigation E. Cesarini 1,2), M.Prato 3), M. Lorenzini 2) 1)Università di Urbino.
Sputtering. Why? Thin layer deposition How? Bombarding a surface with ions which knocks out molecules from a target which in turn will redeposit onto.
X-ray tube.
FVTX substrate FEA1 FVTX Substrate FEA C. M. Lei March 02, 2006.
Zhanshan Wang, Zhenxiang Shen, Qiushi Huang, ZhongZhang, Bin Ma Institute of Precision Optics and Engineering (IPOE), Tongji University Institute of Precision.
Solar Cells need a top side conductor to collect the current generated They also need a conductive film on the backside.
Lithography.
Requirements for Multi-layer Insulation (MLI) in the LCGT Cryostat
Slicer development Eric Prieto LAM.
Unsteady Heat Transfer in Semi-infinite Solids
Ion Beams for Surface Topology Modification
Possible mirror coatings for POLLUX
Tutorial in Mechanical Properties
Memscap - A publicly traded MEMS company
Riccardo DeSalvo (Cal State LA)
BONDING The construction of any complicated mechanical device requires not only the machining of individual components but also the assembly of components.
Hardcoatings Hardcoatings are thin films which are deposited on tool substrates in order to improve their desired properties such as hardness, friction,
Chapter 17 Reflection Homework: Read Section 1, pp. Reflection:
Mechanical Properties Of Metals - I
Presentation transcript:

A Stress Analysis of Sputter Coating on the LSST Primary-Tertiary Mirror Substrate temperature and strain during sputter deposition of aluminum on cast borosilicate glass in a Gemini Observatory coating chamber by Jacques Sebag et al. by Blake Coughenour A Summary of Results from

Scientific Concepts of LSST 6 Band: 300nm-1.1μm Wide Field: f/1.25 viewing 9.62 deg 2 (50x moon area) Camera: 3200 MP Data: 30 TB of data nightly

Reflective Optical Coatings MetalsAve Refl Vis / IRHigh AbsorptionComments Aluminum92 % / 98 % nm Sensitive deposition necessary to prevent "Blueing.” Thin layer of protective Al 2 O 3 forms on surface. Gold94 % / 98 % nm Adhesion issues with glass. Very soft surface. Use Chrome as binderlayer. Silver95 % / 98 %UV Issues with tarnishing. Very soft surface.

Common Coating Processes Aluminum Evaporation Well Tested, Cheap, Simplest Process Recoated every months Loss of throughput for Visible Observations "The main advantage of silver is that it reduces the total thermal emission of the telescope. This in turn increases the sensitivity of the mid-infrared instruments on the telescope and allows us to see warm objects like stellar and planetary nurseries significantly better” - Scott Fisher, Gemini Scientist Silver Sputtering Allows for Multi-Layered Coating with Thickness Control Recoated every 12 months High throughput for Visible-IR observations Low Absorption yields Low Thermal Background noise

Evaporation vs. Sputtering Thin Film EvaporationThin Film Sputtering Pros Fast deposition; Heats Whole Substrate Surface; Good history. Better adhesion – lasts longer; Target can supply large amounts of material Cons Filament limits amount of material; Non-uniform adhesion and thickness Slow deposition rate; Ballistic atoms heat up substrate surface locally Use Borosilicate Monolithic MirrorsULE Monolithic Mirrors and Zerodur Figures:

Sputtering Procedure

Monolithic Borosilicate Mirrors Thermal Characteristics Thermal Diffusivity (D)1.11 x10 -7 m 2 /s CTE (  ) 2.8 ppm/K Specific Heat (c) 710 J/kg  C Strength Characteristics Young’s Modulus58.6 Gpa (8.5 Msi) Typical Breaking Strength13.8 Mpa (2000 psi) Max Tensile Stress0.7 Mpa (100 psi) Max Polished Surface Stress2.1 Mpa (300 psi)

Temperature Stress Recommended by SOML: 5°C Maximum

Test System Tested 28mm Borosilicate Samples with Thermocouples and Strain Gauges in Gemini Observatory Coating Chamber

Temperature Measurements

Temperature Extrapolation

Strain Measurements 10 kW40 kWTensile LimitSurface Limit Back Surface14psi32psi100 psi300 psi Front Surface24psi54psi100 psi300 psi Samples had strain gauges mounted on the back surface to measure strain directly (Thermal + Mechanical)

Summary A Cast Borosilicate Mirror can be safely coated with Sputtering Deposition Techniques Max Temperature Variation below 5°C Resulting Stresses below 100psi Tensile Stress Acknowledgements: Jacques Sebag, John Andrew, Douglas Neill, Michael Warner, Blain Olbert, and Roger Angel

Questions?