Capacitive-Resistive Spacers by ALD Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010.

Slides:

Advertisements

Similar presentations

End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam ALD Research Program, Process Technology Research Group.

Advertisements

Speed-I View from Material Side Qing Peng, Anil U. Mane, Jeffrey W. Elam Energy Systems Division Argonne National Laboratory Limitations on Fast Timing.

MCP Electrodes and End Spoiling

O. Siegmund 11/15/11 20 cm and 33mm MCP Test Progress Lifetest with #164/163 continues – now close to 2 C cm -2 New batch of 33mm test MCPs arrived Chem-3.

Aerogel Structures for Photocathodes

Презентація за розділом “Гумористичні твори”

Центр атестації педагогічних працівників 2014

Галактики і квазари.

Характеристика ІНДІЇ.

Процюк Н.В. вчитель початкових класів Боярської ЗОШ І – ІІІ ст №4

ALD 20µm Microchannel Plates

Composition and thickness dependence of secondary electron yield for MCP detector materials Slade J. Jokela, Igor V. Veryovkin, Alexander V. Zinovev, Jeffrey.

Facilities and Program for Coating 8” Plates Jeffrey Elam, Anil Mane, Qing Peng, Joseph Libera Argonne National Laboratory LAPD Collaboration Meeting June.

Scale-Up Activities in Atomic Layer Deposition at Argonne Jeffrey Elam, Anil Mane, Joe Libera December 9, 2011 Large Area Picosecond Photodetector Collaboration.

Electrical measurements of sputtered NiCr on grid spacers (GS2mm) Dean Walters, Anil Mane Guy Harris, Jeff Elam.

Design and fabrication of electrical measurement system for microchannel plates (LAPD weekly group meeting) Feb Anil Mane, Qing Peng, Jeffrey Elam.

Preparation of Mock tile MCPs Anil Mane, Qing Peng, Jeffrey Elam Argonne National Laboratory.

O. Siegmund, UCB, SSL 1 Incom substrate, 33mm diameter, ANL#103 20µm pores, 8 deg bias, 60:1 L/D, 65% OAR Electrode deposited last (on top/bottom) ANL.

Argonne Atomic Layer Deposition (ALD)... Solutions and Applications: 8/19/2014 T. Maynard, Argonne National Laboratory, Most.

Духовні символи Голосіївського району

Atomic Layer Deposition for Microchannel Plates Jeffrey Elam Argonne National Laboratory September 24, 2009.

Status of ALD MCP Program at Argonne within last Six Months Qing Peng, Anil Mane, Joe Libera, Jeffrey Elam Energy Systems Division.

Status and Results of ALD Microchannel Plate Program

Atomic Layer Deposition for Microchannel Plate Fabrication at Argonne

Update from ALD group IN ANL Qing Peng, Anil Mane, Jeff Elam Energy System.

(8”x8”) MCPs Resistance Measurements Oct 04, 2011 Anil Mane, Jeffrey Elam.

(8”x8”) MCPs Resistance Optimization by ALD Sept 20, 2011 Anil Mane, Jeffrey Elam.

The reading is 7.38 mm. The reading is 7.72 mm.

Discrete Dynode Structures Using ALD and Other Techniques for MCPs

Nanocrystal Diamond SEE Layer for MCP’s

First Mock Tile: Resistive ALD and construction

Progress of ALD Group for MCP

MCP Electrodes and End Spoiling

ALD work status and next plan Nov

Single 20µm MCP Phosphor Tests 7/27/2010

MCP from Glass Substrates

Resistive coating on spacers by ALD

Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014

Проф. д-р Васил Цанов, Институт за икономически изследвания при БАН

ЗУТ ПРОЕКТ на Закон за изменение и допълнение на ЗУТ

О Б Щ И Н А С И Л И С Т Р А П р о е к т Б ю д ж е т г.

Електронни услуги на НАП

Боряна Георгиева – директор на

РАЙОНЕН СЪД - БУРГАС РАБОТНА СРЕЩА СЪС СЪДЕБНИТЕ ЗАСЕДАТЕЛИ ПРИ РАЙОНЕН СЪД – БУРГАС 21 ОКТОМВРИ 2016 г.

Сътрудничество между полицията и другите специалисти в България

Съобщение Ръководството на НУ “Христо Ботев“ – гр. Елин Пелин

НАЦИОНАЛНА АГЕНЦИЯ ЗА ПРИХОДИТЕ

ДОБРОВОЛЕН РЕЗЕРВ НА ВЪОРЪЖЕНИТЕ СИЛИ НА РЕПУБЛИКА БЪЛГАРИЯ

Съвременни софтуерни решения

ПО ПЧЕЛАРСТВО ЗА ТРИГОДИШНИЯ

от проучване на общественото мнение,

Васил Големански Ноември, 2006

Програма за развитие на селските райони

ОПЕРАТИВНА ПРОГРАМА “АДМИНИСТРАТИВЕН КАПАЦИТЕТ”

БАЛИСТИКА НА ТЯЛО ПРИ СВОБОДНО ПАДАНЕ В ЗЕМНАТА АТМОСФЕРА

МЕДИЦИНСКИ УНИВЕРСИТЕТ – ПЛЕВЕН

Стратегия за развитие на клъстера 2015

Моето наследствено призвание

Правна кантора “Джингов, Гугински, Кючуков & Величков”

Безопасност на движението

Plans for ALD on Large Substrates (8”x8”) July 5, 2011

Large area Inconel coatings

Status of ALD on (8”x8”) MCPs/Substrates Jan

Grid space coating-updates 05/01/2012

ALD work status and next plan Nov

First Mock Tile: Resistive ALD and construction

Incom MCP 20µm Substrates 7/27/2010

Status of ALD 33 mm MCP Development at Argonne

Anil Mane, Qing Peng, Jeffrey Elam Argonne National Laboratory

ALD on MCPs updates LAPD group meeting presentation 10/16/2012

Presentation transcript:

Capacitive-Resistive Spacers by ALD Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010

Capacitive-Resistive Spacers 2 Spacers C and R are provided by spacers between detector elements

ALD spacers 3 Use Incom capillary array as substrate for ALD – high surface area to achieve high capacitance start with small disc of Incom array D=5 mm (e.g.)

ALD to For Capacitance and Resistance 4 2. ALD metal 1. Substrate 4. ALD insulator3. Protect 5. ALD metal6. Unprotect7. Electrodes8. Resistive coating