Research Highlights of 2010 Haitao Ding Reuben Wilcock Steffen Mueller Bader Almutairi Ali Alshehri Christopher Cardwell Tess de Leon Rachel Gleeson Kian Kiang Hwanjit Rattanasonti Pejwaak Salimi Alan Taberham Ioannis Zeimpekis- Karakonstantinos Prasanna Srivisavan Ibrahim Sari Carsten Gollasch Mir Mokhtari Michael Kraft

3D Electrostatic Actuator xy actuation Alignment of optical cavity Misalignment between fibre and spherical mirror during fabrication z actuation Stable and tunable optical cavity z actuation accuracy of a few nm (fine tuning)

Actuator Action Comb Drive Suspension System

Fabrication: 60um SOI etched with DRIE Dicing free separation and release with HF vapour etching Allows arbitrarily large proof mass High Performance Accelerometer

Mechanical Amplifiers for MEMS Most MEMS physical sensors rely on tiny deflections of a proof mass The interface electronics introduces thermal noise Introduce a mechanical amplification stage based on a mechanical lever

Mechanical Amplifiers for MEMS

MEMS Laser Target Injection System Electromagnetic Levitation System and Railgun

MEMS Laser Target Injection System Electromagnetic Levitation System and Railgun

Multi DoF Inertial Sensors Applications in active damping control of vibrating panels, structural health monitoring, etc In closed loop operation, the sensors allows direct velocity measurement using a ‘sky hook’ damper

Ion and Charged Particle Trapping Applications in quantum computing, target injection for fusion reactors, nano particle manipulation, etc MEMS Paul RF trap

MEMS Solar Concentrators Thermoelectric power generation with solar light concentrators Achieves high on-chip temperature gradients Initial calculation shows that this could rival high performance solar cells at much lower costs. 16% efficiency simulated for a 10mmx10mm device lens TEG

MEMS DC-DC Converter Interface from energy harvesters (vibration, solar)