1 Prof. Johnny Kin On SIN IEEE Fellow for contributions to the design and commercialization of power semiconductor devices The Hong Kong University of Science and Technology Dept. of Electronic and Computer Engineering Clear Water Bay, Hong Kong

2 Modern Intelligent Power Module  Using VLSI technologies to design compact, low cost, fast acting and efficient power switches for hundreds of amps and thousands of volts! Power Semiconductor Devices Design Old Mechanical Switch Multi-chip IGBT Assembly

3 Power Semiconductor Devices Design (cont’d) P-pillar Trench Source Trench Drain Trench Poly-Si: Top Gate L drift Poly-Si: Trench Gate A power semiconductor device mounted on a lead frame SEM micrograph of a power semiconductor device  The power devices designed require very fine geometry (in the order of 100nms) and are built over a large area.

4 Commercialization of Power Devices  Millions of parts used in applications: Power Modules Automotive Appliances Portable Electronics Consumer Electronics