M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Design Automation.

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Presentation transcript:

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Design Automation Conference, June 2000 Demonstration Schedule Monday, June 5th 12-1PM and 5-6PM Tuesday, June 6th 3-4PM Wednesday, June 7th 5-6PM Michael McCorquodale, Ark Wong, Karthik Nagarajan, Haluk Kulah, Clark T.-C. Nguyen Center for Integrated Microsystems Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor, Michigan

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Typical Front-End of an RF Receiver

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver RF Channel Selection with MEMS Signal Power Antenna  MEMS Filter Desired Information Signal MEMS Filter Signal Power Antenna  MEMS Filter Channel selection achieved by simply activating the correct filter Front-End filters significantly reduce interfering signals prior to subsequent electronics

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Integrated MEMS-BiCMOS SINCGARS Transceiver Architecture

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Vertically-Driven Clamped-Clamped  Resonator To date, most used design to achieve VHF Smaller mass  higher frequency range

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Clamped-Clamped Beam Finite Element Simulation

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Free-Free Beam  Mechanical Resonators Effectively removes anchor dissipation by removing the anchors themselves

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Free-Free Beam Finite Element Simulation

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Beam Length = 14.3  m Support Length = 13.3  m f o = 71.5MHz Q = 8,250 Flexural-Mode Beam Quarter-Wavelength Torsional Beam Anchor 1  m Ground Plane and Sense Electrode 14.3  m Drive Electrode 13.3  m Anchor Fabricated Polysilicon Free-Free Beam  Resonator

M. McCorquodale, A.-C. Wong, K. Nagarajan, H. Kulah, C. T.-C. Nguyen University of Michigan An Integrated MEMS-BiCMOS SINCGARS Transceiver Conclusions Demonstrated advantages of RF channel selection Compared proposed architecture to typical architecture Demonstrated clamped-clamped and free-free beam resonators Reported typical performance parameters for free-free devices