© 2003 Swagelok Company Ultrahigh-Purity Gas Filters SCF Series

© 2003 Swagelok Company Performance Features High particle removal efficiency Extremely low particle shedding Faster moisture dry down Low ΔP Lower cost of ownership Inline and surface mount configurations

© 2003 Swagelok Company Ceramic in Wafer Fabs Diffusion Deposition Etch Target Wafer Chucks Thermal Sensors

© 2003 Swagelok Company Performance Features High particle removal efficiency 0.003µm at maximum rated flow Extremely low particle shedding Faster moisture dry down Low ΔP Lower cost of ownership In-line and surface mount configurations

© 2003 Swagelok Company Construction Membralox Ceramic Element Housing Inlet Outlet Gasket Diffuser Plate Weld Point

© 2003 Swagelok Company Ceramic Powders Organic Binders Paste Mixing Extrusion Drying Low Temp Sintering Manufacturing Process High Temp Sintering Fine Membranes

© 2003 Swagelok Company Single Channel Filter Construction Multi-channel Filter 1 st Membrane Layer 2 nd Membrane Layer Ceramic Membrane Support Block Membrane Layer Flow Direction

© 2003 Swagelok Company Multi-Channel Filter

© 2003 Swagelok Company Membralox versus Sintered Metal Membralox High-flow Filter Element 200x Sintered Stainless Steel Filter Element 200x

© 2003 Swagelok Company Performance Features High particle removal efficiency Extremely low particle shedding –Non-shedding during constant, pulse flow, high pressure differential, and impact test –Extremely low outgassing –Low reactivity –Meets SEMASPEC # A- STD Faster moisture dry down Low ΔP Lower cost of ownership

© 2003 Swagelok Company Performance Features Inlet Membralox Ceramic Element Housing Outlet Weld point

© 2003 Swagelok Company Performance Features Inlet Membralox Ceramic Element Outlet Gasket

© 2003 Swagelok Company Shedding Graphs Particle Emissions Test Data Per Cubic Foot for SCF series 100 std L/min. model filters at 30 psig (2.1 bar). Particle Count/ Cubic Foot Spec Limit

© 2003 Swagelok Company Particle Shedding Particle Emissions Test Data Per Cubic Foot for SCF series 100 std L/min. model filters at 15 psig (1 bar) inlet pressure. Spec Limit

© 2003 Swagelok Company Performance Features High particle removal efficiency Extremely low particle shedding Faster moisture dry down –Dries faster –Holds less post purge moisture –Purges impurities faster Low ΔP Withstands high differential pressures Lower cost of ownership Hours Moisture (ppb) 3 ppb CERAMIC METALLIC Moisture Dry-down

© 2003 Swagelok Company Moisture Challenge and Dry Down Hours Moisture (ppb) 3 ppb CERAMIC METALLIC

© 2003 Swagelok Company Moisture (ppm) Temparture ( O C) Moisture Release on Reheat - Ceramic versus Metallic

© 2003 Swagelok Company Moisture (ppm) Temperature ( O C) Moisture Release on Reheat - Ceramic versus Metallic Ceramic ppm Metallic ppm Temp.

© 2003 Swagelok Company Moisture (ppm) Temperature ( O C) Moisture Release on Reheat - Ceramic versus Metallic Ceramic ppm Metallic ppm Ceramic Temp. Source: RTI

© 2003 Swagelok Company Moisture (ppm) Temperature (°C) Moisture Release on Reheat - Ceramic versus Metallic Ceramic ppm Metallic ppm Ceramic Temp. Metal Temp

© 2003 Swagelok Company Performance Features High particle removal efficiency Extremely low particle shedding Faster moisture dry down Low ΔP –Higher flow than much larger PTFE metallic filters. –Has lower pressure drops than metallic and PTFE filters Lower cost of ownership In-line and surface mount configurations 1 bar 2 bar 3 bar

© 2003 Swagelok Company Pressure Drop SCF Series 30 std L/min models 1 bar 2 bar 3 bar Differential Pressure Bar

© 2003 Swagelok Company Pressure Drop SCF Series 100 and 225 std L/min models 1 bar 2 bar 3 bar Differential Pressure Bar

© 2003 Swagelok Company Pressure Drop Clean and Particle-Loaded Filters 30 psig (2 bar) Inlet Pressure Pressure Drop for SCF series filters with inlet pressure of 30 psig (2.1 bar). Spec. Limit 0.2 Pressure Drop (bar) 0.4

© 2003 Swagelok Company Pressure Drop Clean and Particle-loaded Filters 15 psig (1 bar) Inlet Pressure Spec. Limit Pressure Drop for SCF series filters with inlet pressure of 15 psig (1 bar) Pressure Drop (bar)

© 2003 Swagelok Company Pressure Differential SCF 30 std L/min. Model versus Sintered Metal Micro Filters Differential Pressure Bar Differential Pressure psi Flow Rate Metallic Filters SCF Ceramic Filters

© 2003 Swagelok Company Performance Features High particle removal efficiency Extremely low particle shedding Faster moisture dry down Low ΔP Lower cost of ownership –Reduce downtime –Reduce gas costs –Reduce maintenance –Reduce inventory –Competitive price In-line and surface mount configurations

© 2003 Swagelok Company SEMASPEC Testing Standards Total Hydrocarbon Contribution –# B-STD Moisture Contribution –# B-STD Oxygen Contribution –# B-STD Particle Contribution –# A-STD

© 2003 Swagelok Company SCF Series Filters Product Line

© 2003 Swagelok Company Product Line Inline Filters –Max. flow rates: 30, 225, 600, 900 and 2700 std L/min. –End connections ¼, ½, ¾ inch integral male VCR and ¼ inch female VCR face seal fittings –Lengths: 3.31, 5.00, in. (84.1, 127,and 285 mm)

© 2003 Swagelok Company Product Line Modular surface mount filters –Max. Flow rates: 7, 30, 100 std L/min. –Surface mount design SEMI PR3.1 compliant Gaskets: C-rings and spring energized C-ring Compatible with Swagelok IGC™ll integrated gas system

© 2003 Swagelok Company Ultrahigh-Purity Filters SCF Series