Electron Beam Source Temescal SFIH – 270 – 2 Fernando Lloret Vieira

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Presentation transcript:

Electron Beam Source Temescal SFIH – 270 – 2 Fernando Lloret Vieira March 2014 Fernando Lloret Vieira

Electron beam source Index Electron beam gun Temescal SFIH – 270 – 2 Heat diffusion Emitter Coils and magnetic fields In the MBE system

Electron beam gun A cathode is placed a high potential and electron are leaked in a stream to the anode. Cathode: It is operate at high negative potential. Tungsten filament: It is heated to a bright glow for thermionic emission. Anode: At ground potential, the anode accelerates the electrons in a vacuum environment as an electrostatic field. E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Electron beam gun E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Temescal SFIH – 270 – 2 Filament is inside of a cavity and both (filament and cavity) are at the same negative potential. This cavity generates the electrostatic field which forms the beam. Electrons are directed to the ground potential of the material in the crucible. The electromagnetic coils direct the beam, and the surrounding magnetic fields guide and focus the beam on the target. E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Temescal SFIH – 270 – 2 The design of the Temescal e-beam use a 270º geometry The crucible must be water cooled 5000-20000V Powers as high as 300kW Geometry of the emitter can reduce contamination of the electron source and electron beam scanning range can be expanded E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Cold-hearth containment Heat diffusion The energy of the beam is so intensely concentrated on the surface of the evaporant that it forms a pool of molten evaporant. In the evaporation from a water-cooled crucible, high boiling point materials remain in a solid “skull” at the interface with the crucible. Cold-hearth containment The heat diffusion mechanism is a combination of conduction and convection. The magnitude of heat flow is proportional to the first power of temperature E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Emitter Formed by an anode, a cathode and a filament inside a cavity, the emitter generates the beam by thermionic emission. Emission voltage: 4 to 10kV Filament voltage: 12V maximum Filament current: 50A maximum E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Emitter Filament clamps & screws Filament Anode E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Coil extensions Magnet Magnetic coils E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Basic view of the SFIH – 270. E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields The field of the permanent magnet is used to maintain the beam on the hearth area Magnet E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Magnetic coils The deflection coil is used to accomplish X-Y beam sweep E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Magnetic coils Magnetic suppressor E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Magnetic coils Magnetic suppressor Pole extension The pole extension pieces serve to defocus the beam and enlarge the size of the spot. E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Magnetic coils Magnetic suppressor Pole extension Coil shield E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Magnetic coils Magnetic suppressor Pole extension Coil shield Pole piece The lateral pole pieces supply the field to bend the beam toward the crucible. E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

Coils and magnetic fields Pole piece Coil shield Crucible Pole extension Emitter Electro magnetic coil assembly E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

In the MBE system E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System

In the MBE system Carbon e-gun Silicon e-gun E-beam gun Emitter Heat diffusion SFIH - 270 - 2 Coil magnetic field System