Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Universal Microsystems Gas Flow Restrictors for the Semiconductor Industry Company founded in 1999 Partnership with TEM Filter 3350 Scott Blvd. Santa Clara, CA

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Uses for Gas Flow Restrictors Replace MFC in fixed process applications –steady pressure, single flow set point Safety — limit flow in case of line failure Tamperproof needle valve replacement Flow splitting eliminates multiple MFCs Back fill a chamber in a fixed time

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA UMS Gas Flow Restrictors Orifice inside 316L SS container High accuracy calibration (± 1.0%) Three orifice materials available –SS, & Single crystal sapphire or silicon Quick turn production

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Orifice Flow vs Pressure

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Orifice Characteristics Completely stable No Particle Generation Minimal dry down time Precision of flow at specified pressure –+/- 5% standard, +/- 2% available Orifice will not clog like a filter

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Restrictor body types available 1/4 “ Male/Male VCR 1/8” Male/Male VCR 1/4” Female/Male VCR 1/4” BulkHead VCR Ni media Filter/Restrictor Combination 1 1/8” surface mount sandwich

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA B-Series M/M VCR Flow Restrictor 1.55”.75”.625” VCR Male Union Flow Direction Arrow External Part No. Label

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA F/M or M/F Versions Gland to gland 1.80” Diameter 0.75” Wrench Flats 5/8”

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Filter/Restrictor Combination Specifications  No more than 1 particle/ft 3 âLess than 10 ppb THC âLess than 10 ppb moisture â % removal rating at rated flow  He leak check to atm sccm/sec Precise flow at a specified pressure

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Surface Mount Sandwich Restrictor Restrictor can be inserted into either port 3 Port version available 2-port IGS configuration 1 1/8 ” body size Top Flow ¼”

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA UMS Flow Restrictor Specifications Surface finish, 7-8 Ra electropolish Base Material, 316L SS, Orifice material, Si, Sapphire, or SS Seal for Si (Viton or Kalrez) He leak check atm-cc/sec Maximum pressure, 200 psia Temperature range, 50 to 250 o F

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Sapphire Orifices Orifice diameters from 0.003” to 0.040” Variation in diameter is +/- 2.5µm Different manufacturing runs likely to see different means but tight distribution -2.5 µm+2.5 µm Cross- Section Nozzle side

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Silicon Orifices Used for diameters < 0.003” –or non-integer.001” units Flow from nozzle side 10-15% greater Avoid placing downstream from F plasma Option: sputter deposit Al (both sides) Opportunity to enlarge undersized orifices –Oxidation and strip nm Cross-section nozzle side 50 µm

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Stainless Steel Orifices Mechanical drill OK down to 0.030” Use EDM down to 0.004” EDM precision is +/- 1.5% at.008” EDM most expensive of three types Cross-section 250 µm

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA Standard Orifices & N 2 20 psig Flow range -15 sccm to 40 slm Flow steps in ~ 10% Sapphire orifices designated with N or R, SS orifices with F and Si orifices with S N orifices nozzle side inlet R orifices nozzle side outlet

Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA How to find required orifice This procedure converts the application gas flow at the application pressure into the equivalent N 2 flow at 20 psig Match the converted flow to the flow table