Center for Materials for Information Technology an NSF Materials Science and Engineering Center Vacuum Fundamentals Lecture 5 G.J. Mankey

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Vacuum A vacuum is defined as less than 1 Atmosphere of pressure. 1 Atm = 10 5 Pa = 10 3 mbar = 760 Torr Below Torr, there are more gas molecules on the surface of the vessel then in the volume of the vessel. High Vacuum < Torr Very High Vacuum < Torr Ultra High Vacuum < Torr 760 mm Hg Vacuum ATM

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Why do we need a vacuum? Keep surfaces free of contaminants. Process films with low density of impurities. Maintain plasma discharge for sputtering sources. Large mean free path for electrons and molecules ( = 1 7 x mbar). Mean free path for air at 20 ºC: = 7 x cm / P(mbar)

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Monolayer Time We define the monolayer time as the time for one atomic layer of gas to adsorb on the surface:  = 1 / (SZA). At 3 x Torr, it takes about one second for a monolayer of gas to adsorb on a surface assuming a sticking coefficient, S = 1. At Torr, it takes 1 hour to form a monolayer for S = 1. For most gases at room temperature S<<1, so the monolayer time is much longer. Impingement rate for air: Z = 3 x P(Torr) cm -2 s -1 Sticking Coefficient S = # adsorbed / # incident Area of an adsorption site: A  1 Å 2 = cm 2

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Vacuum Systems A vacuum system consists of chamber, pumps and gauges. Chambers are typically made of glass or stainless steel and sealed with elastomer or metal gaskets. Pumps include mechanical, turbomolecular, diffusion, ion, sublimation and cryogenic. Gauges include thermocouple for 1 to mbar and Bayard- Alpert for to mbar.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Pressure Ranges Rough vacuum >1 mTorr –Rotary vane pump –Thermocouple, Pirani or Capacitance Manometer Medium Vacuum Torr < P < 1 mTorr –Cryo pump, Diffusion Pump, Turbo Pump, Ion pump –BA Ion gauge, mass spectrometer –Viton seals High to Ultra High Vacuum Torr < P < Torr –All Metal Seals –Baked system –BA Ion Gauge, mass spectrometer –Turbo, Ion, Titanium Sublimation Pump,Cryo pump. *O’Hanlon, Users Guide to Vacuum Technology, Wiley (1980).

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Vapor Pressure Curves The vapor pressures of most materials follow an Arrhenius equation behavior: P VAP = P 0 exp(-E A /kT). Most metals must be heated to temperatures well above 1000 K to achieve an appreciable vapor pressure. For P VAP = mbar, the deposition rate is approximately 10 Å / sec. Organic materials have much higher vapor pressures than metals. Care must be taken as to what materials are placed in the vacuum environment.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Materials in Vacuum Outgassing of materials can be the limiting factor in achieving good vacuum. –It is usually best to use all stainless steel, aluminum, glass and copper. –Elastomer gaskets and o-rings should be specifically manufactured for vacuum applications. NEVER USE: –Brass, zinc, or other alloys without first looking up the outgassing rate (should be less than W/m 2 ). *O’Hanlon, Users Guide to Vacuum Technology, Wiley (1980).

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Permeability and Other Gas Sources A single viton seal on a flange, gate valve bonnet or pump inlet will limit the ultimate pressure to >10 -9 mbar. Unbaked systems will rarely reach better than mbar. Trapped volumes or virtual leaks will increase pump down time. Microscopic air leaks can limit the ultimate pressure. The use of a mass spectrometer on a regular basis will help to identify the nature of the gas source.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Pumping Speed Pumps, valves, connections, and hoses all should have compatible pumping speeds. Both pumpdown time and ultimate pressure can be limited by pumping speed. Calculations of pumping speeds of fittings and flanges can be made from the formulae in O’Hanlon and the Ificon vacuum guide.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Rough Vacuum and Leaks During roughing, a large leak can be detected by a hissing sound. Slightly smaller leaks make a sound when liquid (acetone or isopropanol is squirted on them). Once the thermocouple gauge starts to read a vacuum, and if it “gets stuck” at a pressure higher than normal, application of acetone to a leak will cause the reading to fluctuate. Never switch on an ion gauge until you are confident the pressure is below mbar. Application of acetone to a leak will also register on the ion gauge in the pressure range of to mbar. A He leak detector can be used below mbar.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center 1 cm e- Bayard-Alpert or Ionization Gauge Electrons, e-, produced by the hot filament are accelerated through the grid acquiring sufficient energy to ionize neutral gas atoms, n. The ionized gas atoms, I+, are then attracted to the negatively, biased collector and their current is measured with an electrometer. Typical ion gauges have a sensitivity of 1-10 Amp / mbar and range of mbar. Electrometer +150 V -45 V 6 V AC e- n n n n n n n n I+ Filament Collector Grid

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Residual Gas Analysis A quarupole mass spectrometer analyzes the composition of gas in the vacuum system. The system must be “baked” at ºC for 24 hours to remove excess water vapor from the stainless steel walls. The presence of an O 2 peak at M/Q = 32 indicates an air leak. At UHV the gas composition is H 2, CH 4, H 2 O, CO and CO 2.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Vacuum System Schematic Symbols Hand Operated Valve. Gate Valve. Pneumatic Gate Valve. Leak Valve. Butterfly Valve. Pneumatic Butterfly. Bellows. Sorption Trap. Vacuum Gauge. Rotary Pump Turbomolecular Pump. Ti Sublimation Pump. Ion Pump. Cryo Pump. *Inficon Instrumentation Catalog,

Center for Materials for Information Technology an NSF Materials Science and Engineering Center Alabama Deposition of Advanced Materials\ ADAM All materials are either glass, ceramics, stainless steel, copper and pure metals. Two turbomolecular pumps create the vacuum—under construction. Sputtering sources are used for deposition. Characterization methods include LEED, RHEED, and AES. Sample can be ion bombarded and annealed.

Center for Materials for Information Technology an NSF Materials Science and Engineering Center ADAM Vacuum Plant