Wally wins without any effort. Move your own stuff if you know what’s good for you.

ECE Clean Room Safety  Many hazardous materials exist in the clean room  The safety of everyone working in the clean room is top priority  Everyone working in the clean room must know the hazards and how to deal with them

Material Safety Data Sheet - MSDS  Mandated by the Federal government  Employees must have access  All hazardous materials MUST have a MSDS associated with it  MSDS details all hazards, safety requirements, exposure limits, spill or leakage procedures, etc.  CARC Clean Room MSDS sheets are located in my office  You can view them in my office or you can get them on-line from each manufacturer of the hazardous material  The safety office and Brocker Health Center do NOT have all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS

Material Safety Data Sheet – MSDS showing hazardous and required protective equipment

CAMERON HALL Main entrance Second floor entrance

CAMERON – Best entrance to the clean room Craver Road Parking Lot L-16 second floor entrance

ECE Clean Room Safety John’s office Second floor entrance to CARC Manual pull fire alarm

CAMERON’s Clean Room.  The clean room is located on the 2 nd floor, room 201F, of the CARC building.  Access to the clean room is restricted.  Access is through a UNC – Charlotte ID card reader. Front window of clean room Front door to clean room Card reader door lock

Engr 1202 students sign in each time they enter the clean room on the clipboard shown below

ECE Clean Room Safety  Fire alarm includes strobe light and loud alarm  If the alarm sounds, you must leave the building  If an emergency condition exists, it is OK to leave the building with your clean room garments  If there appears to be no emergency – remove clean room garments before leaving the building  Most alarms are false alarms but all alarms must be treated as a serious condition Fire alarm inside clean room

ECE Clean Room Safety Rear clean room exit Rear fire alarm

ECE Clean Room Safety  Inside the clean room is a safety station 1.Deluge shower 2.HF safety instructions 3.Burn and HF salve 4.First aid kit 5.Chemical spill kit 6.Eye wash 7.Hose wash

Liquid Nitrogen Portable liquid nitrogen tank

Hazards of Liquid Nitrogen  Extremely cold, about C  Can cause immediate human tissue damage – frost bite  Leakage or spill in a closed area can cause the oxygen to be displaced with resulting asphyxiation

Deionized (DI) Water Resistivity meter City water feed Supply and return DI water to CR Carbon filters UV sterilizer DI water polisher, set 1 DI water polisher, set 2 Recirculation water pump

Gas Cylinders inside CARC Clean Room Gas pressure regulators

Hazardous Gases used in Microelectronics  Hazardous gases in the CARC Clean Room – all high purity 1. Nitrogen 2. Oxygen 3. Helium 4. Argon 5. Hydrogen 6. Ammonia 7. Methane 8. Chlorine 9. Acetylene 10. Carbon Dioxide 11. Carbon Monoxide 12. Freon  Hazardous gases NOT in the CARC Clean Room 1. Silane 2. Phosphine 3. Arsine 4. Diborane 5. Cyanide 6. Fluorine

Hazardous Chemicals in the CARC Clean Room Acids 1. Hydrofluoric Acid 2. Sulfuric Acid 3. Acetic Acid 4. Nitric Acid 5. Hydrochloric Acid 6. Chromic Acid 7. Phosphoric Acid Bases 1. Photoresist Developer (NaOH) 2. Potassium Hydroxide 3. Ammonium Hydroxide Oxidizers 1. Hydrogen Peroxide Flammable solvents 1. Acetone 2. Methanol 3. Trichloroethyene-TCE 4. Isopropanol 5. Ethane Light Sensitive 1. Positive photoresist 2. Negative photoresist

Chemical Storage Chemical resistant plastic cabinets

Flammable storage inside CARC Clean Room Metal fire-proof cabinets for flammables

Student working with chemicals Fume exhaust laminar flow work station Chemical goggles Chemical gloves Face shield Correctly labeled containers Front exhaust panels Anyone not wearing eye protection when working with chemicals will be removed from the clean room

UNC – Charlotte Microelectronics Clean Room Electrical and Computer Engineering Clean Room Gowning Procedure

Reasons for gowning.  To keep the clean room free of contamination The human body is a bad contaminate for microelectronics –Particles and dirt –Dead skin from your body –Hair particles –Skin oils –Pollen, dust, moisture from your breath  As a protection from hazardous materials in the Clean Room. –Some protection from dangerous chemicals –Protection of clothing from chemical stains

Tacky Mats are located in the gowning area of the clean room.  Tacky Mats are set in place to remove any dirt particles from the bottom of your shoes before entering the gowning area and clean room.  Tacky Mats should be replaced when dirty

Coat Hangers  Coat hangers are a available to hang your coat, book bag, or anything else that needs to be hung up.

Lockers  The lockers are available to store any valuable items that aren’t permitted in the clean room.  You can take into the clean room notebooks, pens or markers, and cameras  You can NOT take into the clean room books, back packs, pencils, food, drinks, coats, hats, IPods, MP3 players, cigarettes, tobacco, hand lotion, etc.

The gown dressing order. 1. Face Mask 2. Safety Glasses 3. Hood 4. Coverall 5. Shoe covers/boots 6. Clean room gloves

Choosing the right size.  Coveralls, hoods, and boots are in lockers by size  Comfort –For coveralls choose one size larger than what you normally would wear.  Boots are available in large and Xlarge only.  Hoods are available in medium and large only.

Face Mask - First  The face mask protects the clean room from any contaminants that may come from your breath.  A metal strip on top of the mask is formed over the nose.  Elastic ear loops secure the mask.  The mask is pulled below the chin.  Masks are disposed of after use.

Safety Goggles - Second  Safety Goggles are worn to protect your eyes from any hazardous chemicals or particles that may inflict damage to your eyes.

Hood  The Hood protects the clean room from any particles from your head and hair.  The hood covers the entire head.  The hood is worn inside the coverall.

Coverall - Fourth  Coveralls cover the entire body. They provide partial protection from hazardous chemicals  Coveralls are used to protect the clean room from any particles generated by the body.

Shoe covers/boots - Fifth  Boots are worn to protect the clean room from any dirt that may be on your shoes.  All snaps must be used to prevent tripping over dangling straps.

Clean Room Gloves - Last  Clean room gloves are available in three sizes, small, medium, and large  Clean room latex gloves provide some protection for your hands from hazardous materials. They are NOT chemical gloves.  Gloves are used to protect the clean room from any dirt, dust, or oils that may be on your hands.  Clean Room gloves are discarded whenever they are torn or dirty.  Special non – latex gloves are available fro people that are allergic to latex.

Completed Gown  After all gowning is complete you can now enter the clean room.  You are not allowed into the clean room unless you are completely gowned

Returning hoods, coveralls, and boots to the proper lockers and stations.  All coveralls, hoods, and boots are returned by size to the appropriate locker.  Gloves and the face mask are discarded in the trash container.

Conclusion  You should now know… –Where the Clean Room is. –About CARC’s Clean Room. –What is an MSDS –Reasons for gowning. –What are the tacky mats. –Where are the coat hangers. –Where are the lockers. –The gown dressing order. –How to find the safety shower, eye wash, and hand spray –How and where to store and use chemicals –Where dangerous gases are stored –What hazardous materials might be in the clean room –What to do if there is an accident

Safety test will be given Next Class  Read all safety notes under Engr 1202 guidelines at the web site  25 questions, multiple choice  No notes or papers  Must pass the safety test to be able to work in the clean room