Nanofabrication Breakout Session Results

Vision Elements Ability to fabricate, by directed or self assembly methods, functional structures or devices at the atomic or molecular level. Ability to probe individual nano devices by either scaled contact methods or more sophisticated optical/electrical non-contact approaches. Nanofabrication is infrastructure to enable revolutionary bottoms-up (assembly from atomic/molecular constituents) solutions, including some that will enable top-down, high-volume solutions. Top-down approach: push resolution to nanometer scale.

Potential Fabrication Technologies/Methodologies Direct atom molecular manipulation w/ scanning probe. –Array technology essential and needs to be extended to wide variety of materials Need: scanning probe position accuracy Beam technology (e-beam, serial, parallel) Directed self assembly (involving guidance & capture) Templating (e.g., molecular, surface, etc.) Film deposition methods Biological/bioassembly techniques (all self-directed assembly) Structured light/optical lattices/atom optics Continuous flow systems (microfluidic) Nanoimprint In-situ analytic tools Light-based lithography Laser tweezer Atomic ink jet Micro tweezers Mixed mode lithography Decoration + super selective trap Controlled surface reactivity Nanopositioning (repeatable, accurate, linear) Self-aligning metrology

Top Priority Gaps in Basic Nanoscale Science & Technology and Manufacturing, Implementaion, & Manufacturability of Nanodevices Control of 3D synthesis of nanostructures Methods to attach single molecules on surfaces w/ specific orientations & density (aka directed assembly) Global navigation to a nanofabricated structure (“picometer GPS”) –Index referencing system Higher throughput metrology capable of near atomic resolution Ultra high accuracy 3D positioning (picometer scale) over large volumes (1 cm3) or length scale Lack of atomically precise tips for AFM, STM Theory, modeling, & simulation in support of nanofabrication & metrology for nanofabrication Surface science for biological materials, soft systems Monitoring dynamics of assembly Interfacing atomic-scale devices (i.e., electrical, chemical) Transition from the micro or nano to the atomic scale (interconnect problem)

Scientific & Technological Infrastructure Needs Infrastructure Needs Need educational/ training opportunities Establish local/ regional research centers Need access to research centers (i.e., national labs, NIST) Funding for developing better tele-operation Coordination of research centers Standardization of fabrication perspective packages General Recommendations & Issues Create special SBIR topic areas for basic nanotechnology studies Target funding for small application development Don’t duplicate international efforts regarding research centers –Use tele-operation

Gaps in manufacturing, implementation, & manufacturability Ultra high accuracy 3d positioning (picometer) over large volume (1 cm3) or length scale [7] Environmental impact management [2] Higher throughput metrology capable of near atomic resolution [3] Nanoscale test sites as reporters/functionality beacons [2] Global navigation to a nanofabrication structure [4] Methods of controlling large (1000x1000) arrays of tips [1] Precise CD standards at nanometer scale Methods to attach single molecules on surfaces w/ specific orientation and density (directed assembly) [5] Batch fabricate nanoparticles w/ low degree of polydispersity Software for design, control, modeling [2] Control of 3D synthesis of nanostructures [3] Stablizing nano structures (passivation) [1] Scatterometry Gaps in nanometer scale science and technology Lack of atomically precise tips for AFM, STM [4] Monitoring dynamics of assembly [3] Surface science for biological materials [3] Theory, modeling, and simulation in support of nanofabrication and metrology for nanofabrication [4] Interfacing atomic scale devices [3] Link/bridge inorganic material to biological material) [1] Component interconnectivity [4] Bridging from the microscale to the nanoscale [3] Inability to etch/sculpt features on a nanometer scale [2] Simulation and physics-based models to interpret metrology data [1] Intrinsic atomic length scales (self-referencing) Detect fluorescence signal at a single photon level and convert to image Non contact inspection of device performance Non contact standing way methods (electron, xray) for wireless contact to nano devices [1]