Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus.

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Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum TT TT T TT TT T T T T T T T T TT T TT TT T TT TT T T T T T T T T TT T Step 1Step 2Step 3Step 4Step 5Step 6 Step 7Step 8Step 9Step 10 Step 11 Step 12

Step 1: Cleaning Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Starting Si Wafer & Sulfuric Acid / Peroxide Clean Cross-section View of Wafer Insert text here Overhead View of Wafer

Step 2: Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Plasma Enhanced Chemical Vapor Deposition Of Silicon Dioxide Overhead View of Wafer Cross-section View of Wafer Insert text here. Probably include picture and name of machine here

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning (cont.) name

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning (cont.) name

Step 4: Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist INSERT Overhead View of Wafer Cross-section View of Wafer

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Overhead View of Wafer Cross-section View of Wafer Step 5:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Overhead View of Wafer Cross-section View of Wafer insert Step 6: name

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Overhead View of Wafer Cross-section View of Wafer Step 7:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Cross-section View of Wafer Step 8: Overhead View of Wafer name

TT TT T TT TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum name Step 9: Cross-section View of Wafer Overhead View of Wafer

TT TT T TT TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Aluminum Removal by Acid Etch Overhead View of Wafer Cross-section View of Wafer Step 10:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Overhead View of Wafer Cross-section View of Wafer T T T T T T T TT T name Step 11:

T T T T T T T TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum name Cross-section View of Wafer Step 12: Overhead View of Wafer