Boris N. Chichkov Leibniz University Hannover Nanomanufacturing Boris N. Chichkov Leibniz University Hannover 16.04.2017 b.chichkov@lzh.de

Two-photon polymerization Laser ablation Laser printing Laser nanomanufacturing technologies near IR fs-pulses resin Two-photon polymerization Laser ablation Laser printing

Fs laser microstructuring SEM image of high quality microchip fabricated in 400 µm thick AlN substrate

Laser generation of nanoparticles target laser Nano- particle Liquid High purity and stability Monoatomic materials Alloy nanoparticles Particle surface-functionalization Polymer-embedded nanoparticle Coatings with nanosized particles Controlled drug-release Stoichiometric nanoparticles Novel methods  better control J. Phys. Chem. C, 2010 Appl. Phys. A, 2010 4

Fabrication of spherical nanoparticles by laser printing Receiver substrate (glass) Tightly focused fs laser pulse Thin Au film Donor substrate (glass) „Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“ JOSA B, Vol. 26, No. 12, B130, 2009 5

Controlled fabrication and precise deposition of silicon nanoparticles 200 nm Receiver substrate (glass) Bulk silicon Tightly focused fs laser pulse Silicon nanoparticle Silicon dioxide Silicon donor layer 50 µm „Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“, Nature Communications, 5, No. 3402, (2014). 6

Nanotechnology with lasers 3D nanostructuring by two-photon polymerization Ormocer near IR fs-pulses resin Opt. Lett. 28, 301, (2003) Adv. Eng. Mat. 5, 551, (2003) Deutsches Patent 101 52 878.7-43

PhCs fabricated in Zr-hybrid polymers This is the SEM image of the woodpile structure produced by 2PP. The period is 900nm and the rod thickness is 300nm. In the magnified top view one can see throught the four upper layers. Nature Photonics, v. 3, 450 (2009)

Two-photon polymerization (5cm/s) This is the SEM image of the woodpile structure produced by 2PP. The period is 900nm and the rod thickness is 300nm. In the magnified top view one can see throught the four upper layers. Commercially available 2PP system from LZH: b.chichkov@lzh.de

Microoptics: Tapered waveguides Im folgenden Beispiel wurde eine solche 3D Taperstruktur mit Hilfe der 2PP hergestellt. Der Taper sollte auf der Einkoppelseite einen Querschnitt von 10 µm haben und dann in einen 2 µm Wellenleiter übergehen, der einen Single-Mode Wellenleiter für Licht mit 1500 nm Wellenlänge darstellt. Man sieht hier erste Ergebnisse zu diesen Strukturen im REM Bild.

Fabrication of SRRs by laser direct-writing Mechanical properties of the polymer allow fabrication of free standing SRRs Excitation of magnetic resonance for radiation incident perpendicular to substrate surface (kz) FDTD simulation of single SRR response Ring diameter: 5 µm Wire diameter: 800 nm Gap width: 800 nm Resonance: 11 µm wavelength (RLC model)

3D conductive polymer microstructures PEG-DA and EDOT blends are used for 2PP and sequential in-situ oxidative polymerization; Real-3D, physically stable and biocompatible microstructures are produced; Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities of up to 0.04 S/cm. EDOT PEDOT PEG-DA : poly(ethylene glycol) diacrylate EDOT : 3,4-ethylenedioxythiophene PEDOT : poly(3,4-ethylenedioxythiophene)

3D ultralight and ultra strong materials

Surface plasmon-polaritons for data transport Plasmonics Photonics 1 THz 1 GHz Operating speed Electronics 1 MHz The Past 1 kHz 10 nm 100 nm 1 µm 10 µm 100 µm 1 mm Critical dimension R. Zia et al., Materials Today 9, 20 (2006) 14

Surface plasmon-polaritons Bandwidth of light: 400 THz – 750 THz Core size: ~ 8 µm Bandwidth of electronics: ~ 10 GHz pitch: ~ 65 nm 15