The EX5 Excimer Laser A total metal ceramic excimer laser with many advantages Low cost Mini laser Long gas lifetime Low cost of operation Computer controlled.

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Presentation transcript:

The EX5 Excimer Laser A total metal ceramic excimer laser with many advantages Low cost Mini laser Long gas lifetime Low cost of operation Computer controlled Air cooled High power in a compact table top package GAM LASER, INC. 2009

TYPE II SUPERCHAMBER Performance Highlights Total Metal/ceramic design Corona preionization New chamber material New direct drive blower New electrode design Active optics filtering for longer optics lifetime Improved optics material Increased bearing lifetime Increased gas lifetime Linear power with repetition rate Higher repetition rate 1% pulse to pulse stability Reduced parts count gas handling system Solid state thyratron GAM LASER, INC. 2009

EX5-F2 157nm PERFORMANCE Vacuum Ultraviolet at 157nm Single Fill gas lifetime 10 million pulses Static gas lifetime 10 Days Energy 2mJ Average power .65 W Stability <2% RMS KF/16 purge flange included GAM LASER, INC. 2009

<3% Standard Deviation EX5 Specifications PARAMETER F2 ArF KrF XeCl XeF Wavelength nm 157 193 248 308 351 Energy Max. mJ 1.5/2 12 20 8 6 Peak Power kW 250 1500 2500 1000 750 Average Power @ 250Hz 0.4 2.4 4.0 1.4 1.3 Average Power @ 500Hz 0.65 8.0 2.5 Repetition Rate Max. Hz2  250/500/750 Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6 Shelf life to 50% energy 10 days 20 days 30 days >3 Months 30 Days Pulse Length nS Stability <3% Standard Deviation Tube Service 2 Billion Pulses Beam Size, mm 3X 6 Divergence, mRad full angle 1 X 2 Cooling AIR Timing Jitter 2nS Standard Deviation Weight 15kg GAM LASER, INC. 2009

Dynamic Gas Lifetime GAM LASER, INC. 2009

Repetition Rate Performance GAM LASER, INC. 2009

Pulse to Pulse Stability GAM LASER, INC. 2009 0.77% rms Stability @ 200Hz, 13.5mJ KrF 248nm

EX5 Running Costs Running costs for 2 billion pulses ArF KrF Refurbishment after 2 billion pulses $7500 $7500 Premix gas cylinders $1500 $1200 Optics exchanges $7000 $1150 Total costs $16000 $9850 Cost per Thousand pulses $0.008 $0.0049 Running cost per hour at 200Hz $5.76 $3.53 Cost per pulse 0.8e-5 ¢ 0.49e-5 ¢ GAM LASER, INC. 2009

GAM LASER, INC. 2009

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