SCALABLE PRODUCTION OF POLYMERIC NANOPARTICLES YING LIU ASSISTANT PROFESSOR DEPARTMENT OF CHEMICAL ENGINEERING DEPARTMENT OF BIOPHARMACEUTICAL SCIENCES UNIVERSITY OF ILLINOIS AT CHICAGO

NANOPARTICLES FOR DRUG DELIVERY  Increase hydrophobic compound solubility and bioavailability Rate   A i (C sat - C bulk )  Targeting drug delivery Passive targeting tumors (EPR) Functional surfaces PEG: bio-inert, long circulating PAA: mucoadhesive PEG-ligand: active targeting  Protection from degradation  Sustained drug release Nanoparticle stabilized with block copolymers

Reproducible, large scale production of particles with controlled properties  Formation  Stability  Application Research in laboratories Clinical application HOW TO GET THERE?

FLASH PRECIPITATION AND DRY PROCESS  Scalable and continuous process  Long-term stability  Enhanced oral bio-availability (>1000 compared to the pure drug and >10 compared to the Labrasol®)  >50% drug loading  controlled size distribution and surface properties

INCREASED BIOAVAILABILITY AND FUNCTIONALITY SR13668 Bioavailability in dogs Curcumin for attenuating morphine tolerance and dependence using mouse model

ADVANTAGES OF THE MICROSCALE DAVID EDDINGTON ASSISTANT PROFESSOR DEPARTMENT OF BIOENGINEERING MICROFLUIDICS AND DIAGNOSTICS UNIVERSITY OF ILLINOIS AT CHICAGO

Rapid Diffusion Large surface to volume ratio Laminar flow Process integration ADVANTAGES OF THE MICROSCALE Mohammed et al, 2009, Lab on a Chip Brett et al, 2012, Lab on a Chip Sinkala et al, 2012, Lab on a Chip Launiere et al, 2012, Analytical Chemistry

Current Tools: Hypoxic Chambers Crude, inefficient, and problematic Cannot replicate gradients of oxygen found across all tissues in every animal Microfluidic devices can control oxygen over many levels Cells (multiwell plate and open-well) Tissues (islets and brain slices) Animals (wound healing) OXYGEN IS A KEY METABOLIC VARIABLE

FUNCTIONAL ASSAY FOR ISLETS

HIGH VS LOW POTENCY ISLETS 1000 human islets transplanted into nude mice Our device can evaluate islet tissue better than standard methods Standard evaluation shows no difference in function Gold standard = 30 day mouse transplantation model Quick, but poor predictor Predicts outcome, but only in retrospect

POWER CONVERTERS MAHSHID AMIRABADI ASSISTANT PROFESSOR DEPARTMENT OF ELECTRICAL & COMPUTER ENGINEERING POWER ELECTRONICS, RENEWABLE ENERGY SYSTEMS, ELECTRIC AND HYBRID ELECTRIC VEHICLES, AC DRIVES UNIVERSITY OF ILLINOIS AT CHICAGO

POWER CONVERTERS  Power converters control and process the flow of electrical energy.  These circuits are integral part of many systems including, but not limited to, renewable energy systems and electric and hybrid electric vehicles.  Power Electronics is an Enabling Technology.

CHALLENGES Power converters used in Photovoltaic power generation systems are responsible for more than 50% of the failures! Power converters used in a PV system need to be replaced every 5-10 years. Therefore, the actual cost of a PV system should include the periodic inverter replacements. Weight and Volume Reliability Cost

SOLUTION: AC-LINK UNIVERSAL POWER CONVERTERS  The AC-link universal power converters are a new class of power converters with numerous advantages:  Much more compact (at least 15 times smaller) due to high frequency of operation  More reliable due to modification of the topology and eliminating the vulnerable components  Less expensive Conventional Topology (A) First generation of AC-Link Universal Power Converter (B) Power30 kW weight1204 lb80 lb Power density0.024 kW/lb0.375 kW/lb Efficiency95%97% Courtesy of Ideal Power Converters Inc. A B

AC-LINK UNIVERSAL POWER CONVERTERS  We have pending patents on configurations with superior performance over the first generation. They require fewer semiconductor devices; while offering the same advantages:  Dramatically improving the reliability (reducing the failure rates)  Further reducing the size/weight  Reducing the cost First generation of AC-Link Universal Power Converters Conventional Power Converter

WIDE-BANDGAP SEMICONDUCTOR DEVICE BASED RAPID AND INTELLIGENT PROTECTION SUDIP K. MAZUMDER PROFESSOR DEPARTMENT OF ELECTRICAL & COMPUTER ENGINEERING DIRECTOR, LABORATORY FOR ENERGY AND SWITCHING-ELECTRONICS SYSTEMS UNIVERSITY OF ILLINOIS AT CHICAGO

WHY WIDE-BANDGAP TECHNOLOGY (E.G., SIC/GAN)?  Higher breakdown voltage capability  Reduced on-state drop  Reduced leakage current  Typically higher thermal conductivity  Higher current density  Reduced switching loss and low device capacitance (i.e., faster switching)  Reduced die size

MECHANISMS OF DEVICE ACTUATION Electrical Triggering  E.g., 3-terminal MOSFET, IGBT devices  In some cases standard gate drivers can be used  Low- and high-side gate drivers needed Optical Triggering  Triggering technology that Prof. Mazumder at UIC is currently pursuing  Direct optical excitation can provide very rapid actuation response (faster than electrical triggering) with high di/dt and dv/dt  Optical triggering eliminates the need complex high-side gate drivers leading to simple gate driving mechanism  Higher reliability due to complete electrical isolation between power and control stages  Work undergoing that can control the switching dynamics of the device when it is turning on or turning off

IMPLICATIONS FOR PROTECTION  Wide-bandgap technology can enable realization of robust protection devices that can yield both rapid actuation and steady- state endurance  Fast and discrete switching implies intelligent rapid control sequencing of single as well as array of protection devices (e.g., for distributed systems)  Optical technology provides enhanced reliability at high di/dt and dv/dt, yields high reliability to back propagation, simple scalability of protection devices to significantly higher voltage and current levels via series and parallel connections without complex gate drivers

OPTICALLY-SWITCHED POWER SEMICONDUCTOR DEVICES: STATUS AT UIC 3 patents received S.K. Mazumder and T. Sarkar, “Optically-triggered multi-stage power system and devices”, U.S. Patent Number , awarded on May 22, S.K. Mazumder and T. Sarkar, “Optically-triggered power system and devices”, USPTO Patent# 8,294,078, awarded on October 23, S.K. Mazumder, “Photonically activated single bias fast switching integrated thyristor”, USPTO Patent# US B2, awarded on August 5, Past and ongoing project support: ARPA-E (in partnership with Cree, Silicon Power), DOE (in partnership with GeneSiC), NSF (in partnership with SiCrystals, Cree), ONR (in partnership with Spire), and AFRL (in partnership with APEI technologies) Voltage and current levels targets in a few of these projects: 15 kV, 1 kA (with surge of 3 kA) at 200 o C junction temperature at 10 kHz with rise and fall times of less than 1 microsecond 1200 V, < 50 A at 200 o C ambient temperature at a switching frequency of 100 kHz

NOVEL OPTICALLY ACTIVATED CONTROLLER FOR HIGH VOLTAGE SIC FIELD EFFECT DEVICE Challenge: Design next generation optically modulated power electronics control Impact: Improved performance, stability, efficiency and reliability at higher voltage and current Outcomes:  Initial experimental switching transition controller developed;  Optical control demonstrated for high- voltage field-effect and bipolar devices;  Prof. Mazumder invited in 2014 to deliver Invited Tutorial by leading international conferences (EPE, IEEE IECON, IEEE CDC, IEEE PEDES).

RELATED PUBLICATIONS OF PROF. MAZUMDER’S GROUP 1.A. Agarwal, Q. Zhang, A. Burk, R. Callanan, and S.K. Mazumder, "Prospects of bipolar power devices in silicon carbide", Invited Paper, IEEE Industrial Electronics Conference, pp , S.K. Mazumder, A. Mojab, L. Cheng, A.K. Agarwal, and C.J. Scozzie, "Optically-switched high-voltage bipolar SiC device", IEEE Workshop on Wide Bandgap Power Devices and Applications, A. Mojab, S.K. Mazumder, L. Cheng, A.K. Agarwal, and C.J. Scozzie, "15-kV single-bias all-optical ETO thyristor", IEEE International Symposium on Power Semiconductor Devices, S.K. Mazumder and T. Sarkar, "SiC-based optically-gated high-power solid-state switch for pulsed-power application", Journal of Materials Science Forum, vols , pp , S.K. Mazumder and T. Sarkar, "Optically-activated gate control for power electronics", IEEE Transactions on Power Electronics, vol. 26, no. 10, pp , H. Riazmontazer and S.K. Mazumder, "Optically-switched-drive based unified independent dv/dt and di/dt control for turn-off transition of power MOSFETs", IEEE Transactions on Power Electronics, H. Riazmontazer and S.K. Mazumder, "Self-contained control for turn-on transition of an optically-driver IGBT", IEEE Applied Power Electronics Conference, pp , T. Sarkar and S.K. Mazumder, "Photonic compensation of temperature-induced drift of SiC-DMOSFET switching dynamics", IEEE Power Electronics Letters, vol. 25, no. 11, pp , T. Sarkar and S.K. Mazumder, "Dynamic power density, wavelength, and switching time modulation of optically-triggered power transistor (OTPT) performance parameters", Microelectronics Journal, vol. 38, pp , T. Sarkar and S.K. Mazumder, "Epitaxial design and sensitivity studies for optically-triggered GaAs-AlGaAs superjunction heterostructure power device", IEEE Transactions on Electron Devices, vol. 54, no. 4, pp , 2007.

WHAT CAN UIC TEAM DO (REGARDING PROTECTION DEVICE)?  Can work with the industry to understand their protection needs to identify the suitability of semiconductor device technology for specific protection application needs;  Design, analysis, and optimization of semiconductor protection device;  Work with pre-existing partners with regard to custom-made fabrication and packaging of prototype devices;  Scaled experimental characterization of steady-state and transient responses. Work with the industry for full scale testing;  Design and synthesis of scaled intelligent control mechanism for semiconductor protection device. Work with the industry for full scale realization.

NANOTECHNOLOGY CORE FACILITY THE NANOTECHNOLOGY CORE FACILITY (NCF) AT THE UNIVERSITY OF ILLINOIS AT CHICAGO IS A VERSATILE MEMS/NANO FACILITY AND IS ACCESSIBLE TO BOTH NON-PROFIT ACADEMIC AND INDUSTRIAL RESEARCHERS. WITH OVER 4000 SQ. FT. OF CLEAN ROOM AND LABORATORY SPACE IN THE ENGINEERING RESEARCH FACILITY (ERF) BUILDING, THE NCF IS ONE OF THE LARGEST IN THE CHICAGO-METRO AREA

NCF PROTOTYPE CENTER The facility is a prototype center for:  BioMEMS.  Chemical sensors.  Magnetic, microfluidic and photonic devices. The Nanotechnology Core Facility enables research by providing access, training, service and process guidance on fabrication and characterization equipment. Class 100 Photolithography Bay

MEMS/NANO INCUBATOR No IP sharing required. Inexpensive and flexible 24/7/365 access. Inexpensive training, service, and process guidance available from experienced and professional staff. Exclusive access to equipment and space can be arranged. Unusual materials and substrates can often be accommodated. Quick turnaround and fast decisions on proposed clean room processes. Optical profiler scan of MEMS structure

FABRICATION EQUIPMENT Optical and Electron Beam Lithography Systems Wet Processing Stations Thermal and Electron Beam Evaporation RF Magnetron Sputtering RIE/PECVD System Deep RIE of Silicon LPVCD of Poly Si and Si Nitride Rapid Thermal Processing Au Ball Wire Bonder Wafer Dicing Systems Raith eLINE 150 Electron Beam Lithography

FABRICATION Suss Optical Aligners Wet Processing Stations Varian E-Beam Evaporator STS RIE/PECVD

CHARACTERIZATION EQUIPMENT Optical profilometry Stylus contact profilometry Ellipsometry Optical Microscopy AFM, MFM, STM and Wafer SEM Electrical IV-CV measurements MFM of sub-micron size magnetic islands

CHARACTERIZE Veeco Optical Profiler Optical Microscope Gaertner Ellipsometer Nanoscope III AFM

NEW EQUIPMENT ARRIVING SOON! Nanoscribe 3D Laser Lithography System Bruker Dimension Icon AFM System Zygo NewView 7300 Optical Profilometer Bruker-Nano DektakXT Contact Profilometer Disco 6 inch Wafer Saw Westbond Wedge-Wedge Wire Bonder Self-assembly on magnetic islands

CONTACT INFORMATION Dr. Antonio DiVenere, NCF Director Dr. Seyoung An, NCF Lab Manager SEM of PbSe focal plane array