National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy July 1, 2014 Cleanroom administrative committee Meeting

TUMS MURTHY July 1, 2014 Cleanroom Admin Commitee Meeting Equipment Charge proposal Sl no.Equipment/ ActivityCurrent NNfC Rate in Rs/hr Proposed NNfC rate in Rs /hr SNF rate in Rs/hrRemarks 1Raith e-line Electron beam Litho system ( Lithography, Inspection, SEM) 10,00020, SNF Premium tool charged at +23% of base rate. $ x 1.23= $306.5 including overheads 2DRIE 10, All atmospheric furnaces: Wet and dry oxidation, Boron Diffusion, Phosphorous diffusion, Drive-in, Annealing , All LPCVD furnances : Nitride, Poly-silicon, Silicon Dioxide 5ICP RIE ( Cl & F chemistry); PECVD( Nitride, Poly, Oxide), ALD (Al2O3) 6Dielectric and Metal sputtering, E Beam evaporation 7Mask aligner for Optical Lithography ( MJB4 and EVG 620) Laser Writer for Optical Lthography ( Microtec, Heidelberg) Wafer bonder (EVG 501) 8Mask writing ( Microtech, Heidelberg). Charge capped at a maximum of Rs. 10,000 for each 3-inch mask plate NA Increase cap toRs. 20,000 9Thermal evaporation Unit Chemical wet bench ( RCA Clean, Pirnha Clean, Etching) Equipment Charge Cap 3,00,000/month4,00,000 ?? SNF cap is roughly 40 hrs usage Staff support charge rate 6131 Training charge rate 9174 Consumables Charge Cost %

TUMS MURTHY Effluent testing by Shriram Institute – All effluents were tested – Dry Exhaust, Wet Exhaust and general exhaust are within spec – Acid/Alkali drain after ETP is within spec – Fluoride level after ETP is high at 21 ppm reduced from 575 ppm at inlet. Need process optimization to bring this level down to ~3 ppm DI water was tested for 42 parameters and is within spec ( TOC<0.1ppm, Silica-nil, Sodium, Potassium <0.01ppm) July 1, 2014 Cleanroom Admin Commitee Meeting Action Items

TUMS MURTHY Propose to conduct orientation course twice a year – August 3 rd Tuesday and Wednesday ( Aug 19, 20) – February 3 rd Tuesday and Wednesday Successful completion of this course will be a pre-requisite for authorization to use NNfC 3 modules of 1 hr will be offered on each day Each lecture will cover fundamental principles and practice and capabilities in NNfC July 1, 2014 Cleanroom Admin Commitee Meeting New User Orientation

TUMS MURTHY Day 1 – Introduction to Cleanroom procedures and protocols, EHS ( Environment, Health and Safety) – Wafer Cleaning and wet processing – High temp growth and deposition ( Oxidation, Doping, LPCVD, RTP) Day 2 – Plasma processing (Deposition and etch) – PVD (Sputtering and Evaporation of materials) – Lithography July 1, 2014 Cleanroom Admin Commitee Meeting Orientation Course

TUMS MURTHY Evaluated two solutions – Badger. Used by several University Nanofabs in USA. Relatively expensive ($20K /year) After-sales support is expected to be better. No known users outside USA – FOM Networks Used by far smaller number of labs/centers Inexpensive ( Initial cost $5K-$15K, only $1.5 K/year) Weak after-sales support A few installations outside USA( China, Europe) July 1, 2014 Cleanroom Admin Commitee Meeting Fab Management software

TUMS MURTHY Chemical storage reviewed – 2 rooms on 1 st floor – 2 rooms on 2 nd floor Exhaust enhanced, sun-film on windows The rooms on 2 nd floor need air-conditioning during summer to maintain temperature around 23 deg C – Cost estimated ~7 lakhs ( not negotiated) July 1, 2014 Cleanroom Admin Commitee Meeting Facilities Highlights

TUMS MURTHY UPS batteries replacement – Found defective 4 batteries in 250 KVA UPS 1 each in the 250 KVA and 500KVA UPS – Intermediate step to replace weak batteries – Recommended step replace all batteries in one UPS 500KVA UPS 150 nos lakhs ( Rocket ) 250 KVA UPS x 3 80 each -10 Lakhs x 3 (Panasonic) July 1, 2014 Cleanroom Admin Commitee Meeting Facilities Issues

TUMS MURTHY Cleanroom fresh air supply duct leakages – Found fresh air leakage inside the tunnel One leak at the joint at exit from tunnel in Litho supply One probably near the inlet Others, if any, are not reachable – Working with Nanoclean to rectify the leakages – To find long term solution to the problem of thermal insulation deterioration and damage ( pests ?) and leakages inside the tunnel July 1, 2014 Cleanroom Admin Commitee Meeting Facilities Issues

TUMS MURTHY User statistics May user statistics : – 80 users ( 45 from CeNSE) – Billed 19.0 Lakhs ( 15.5 from CeNSE) July 1, 2014 Reports Cleanroom Admin Commitee Meeting

TUMS MURTHY July 1, 2014 Cleanroom Admin Commitee Meeting Thank You

TUMS MURTHY July 1, 2014 Cleanroom Admin Commitee Meeting NNfC budget estimates DescriptionCost in Lakhs of Rupees Cleanroom Consumables Utilities Consumables Sub total Process equipment AMC Process equipment spares Utilities AMC Sub-total TOTAL

TUMS MURTHY Continuous improvement actions – Fire protection system commissioned in auto- mode – Sun-film on all windows of clean room – Exhaust fan fixed over Silane cabinet – Wet exhaust scrubber repairs (section of ducts and window screens) July 1, 2014 Cleanroom Admin Commitee Meeting Facilities Highlights