Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments: HP4274A (LCR), K6517 (electrometer), HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu) Software (user friendly and some error protections) Probestation 2: 6“ (200mm * 100mm + 15mm Z) IQC Instruments: LCR, electrometer, voltage supply Status: Operational Misc: Homemade relay system (17 channels each) Optical Inspction: Zeiss CMM (500*500*500) Res.: 1 m (Z~5 m) Hardware setup
Chuck
Probestation
Error estimation 1000 measurement runs on one strip (ST teststructure) ParameterMean MinMax Rpoly (M ) 1,0640, Leakage current (pA) 62,12,259,064,0 Coupling capacitance (pF) 108,30,78106,13108,57
Software – Front panel Testing time ~ 2h
Probing marks Hamamatsu Karlsruhe
Pick up tool
Packaging (Hamamatsu) Sensor Teststructures Sandwich packaging in envelope Bad to handle Optical inspection HANDLING against specification Takes time Air cusion effect while placing gliding
Packaging 2 (ST) Optical inspection very good Easy to take out All 4 TS available
Optical survey and dimensional measurements
Check Sheet:
Pictures 25 m
More pictures Scratchpad used RpolyAdd DC pad 3 AC pads
Electrical characterization of sensors Rpoly with 10VRpoly with 2V Changes in measurement with respect to specs
Electrical characterization of sensors Summary
Electrical characterization of sensors CV & IV
Electrical characterization of sensors Rpoly
Electrical characterization of sensors coupling capacitance
Electrical characterization of sensors leakage current
Comparison of our test results with industry results (based on 5 sensor of 8 ) IV even lower than company measurement CV perfect agreement Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only) No single strip fault (agreement) (neglect Rpoly)
Relevant problems Nothing Serious V depletion not calculated Improvements: Automatic web publishing (ready 50%) Implement Pattern recognition
Optical survey of ST prototype Pinhole or bad coupling capacity No strange electrical behavior
Optical survey of ST prototype 2 Z ( m) Bowl shape! Asymmetric cut! Global size OK!
Pads
Electrical Survey Very high total leakage current Depletion voltage fine One region (7 strip) with a very high leakage current Some coupling capacitors out of specs