mSR Series miniature Square Rail Linear Positioner Hello and thank you for viewing this presentation on the mSR series of miniature, high precision positioners

Do you have applications in any of these industries? Life Science (Microscopy) Electronics Manufacturing Semiconductor Do you have positioning applications in either semiconductor metrology, electronics manufacturing, or life science microscopy?

Miniature Positioning Trends Small form factors Higher dynamic response Higher resolution Higher repeatability Higher accuracy Rapid instrument development and deployment If so you’re probably looking for components that fit a small form factor, deliver a high dynamic response, allow for high resolution, which give your process high consistency, and can help you develop equipment at lightening speed.

Would you also like… Robust linear motion A modular solution that can easily be adapted to XYZ systems Tailored precision performance A dependable, proven supplier of linear motion products Short product leadtimes Would you also like robust motion, which can be used 24/7, a modular platform that can be adapted to XYZ systems, performance that can be selected to meet your needs, from a dependable motion supplier, with best in class leads times?

Introducing the next generation of miniature precision positioning! The NEW mSR! If so then the allow me to introduce you to the mSR series of miniature square rail guided linear positioners.

mSR Series Positioner 2 form factors 2 different linear motors Ironcore Ironless 6 different encoder options The mSR series fits one of two form factors, the mSR 80 and mSR 100, 80 and 100 referring to the positioner’s metric width. These stages are driven with one of two linear motor technologies. Either an ironcore motor for superior thrust density in miniaturized packaging or an ironless linear motor allowing for extremely smooth linear motion. Each of these stages can be configured to up to six different encoder technologies dependent upon your application need. 25 mm 35 mm 80 mm 100 mm

mSR 80 Next generation solution for MX80-L applications Allows for higher precision performance (4 X better repeatability) Fits similar volumetric foot print Uses the same ironcore linear motor as its drive Designed with latest encoder technology on board Let’s begin with the mSR 80. The mSR 80 is the next generation, miniature solution for applications which might currently use Parker’s globally recognized MX80L. The mSR 80 allows for substantially higher precision performance, and fits into a similar volume to what the equivalent stroke MX80L would. The mSR 80 uses the same ironcore linear motor used on the MX80L, but has been enhanced with latest encoder technology.

mSR 80 Design Features Center driven direct drive motor Optional magnetic counterbalance Produces high thrust in small packaging, yielding excellent dynamic response Allows for Z-axis orientation without the need for air Integrated linear encoder, home and limits Now lets examine some of the design features of the mSR 80. We begin with two integrated precision square rails which in addition to providing guidance give the stage superior straightness, flatness and stiffness. Couple to that a center drive Ironcore linear motor, which gives the stage exceptional thrust in a condensed package, yielding excellent dynamic response. The mSR 80 is outfitted with any one of five different linear encoder options, all of which integrated limit and home sensing. An optional magnetic counterbalance can be attached to the mSR 80 with 25 mm stroke as standard, for Z axis applications. The magnetic counterbalance is ideal option for applications requiring a quick Z axis response like focusing applications, with the advantage of not requiring any additional power source or compressed air to achieve this. Lastly the mSR 80 uses the same mounting pattern as the MX80L and has dowel pinning built into its design, which allows the user an easy means of consistently mounting the stage. Five encoder options for flexible precision performance, with adjustable onboard limits and home sensing Integrated high precision square rails Convenient mounting holes and dowel pinning Provide guidance, allows for superior straightness /flatness, and stiffness The same mounting as MX80-L for ease of migration

mSR 80 Stroke Performance Stroke (mm) 25 35 50 100 150 Max. Load (kg) 4 8 Continuous Thrust (N) Peak Thrust (N) 12 24 Maximum Speed (mm/sec) 1100 1500 2000 Maximum Acceleration (G’s) 3 Bi-Directional Repeatability (µ)1 0.1 Straightness and Flatness (µ)1 5 10 The mSR 80 is available in any one of five discrete stroke lengths of 25, 35, 50, 100 and 150 mm. The 25 and 35 mm strokes are only available with the 4 pole or CS motor option producing 4 N of continuous thrust or 12 N peak. The 50, 100 and 150 mm strokes are available with the 8 pole linear motor yielding 8 N of continuous thrust, and 24 N peak. The mSR 80 is capable of precision down to 0.1 microns of bi-directional repeatability. 1Precision grade, with 0.01 micron optical encoder

mSR 80 Performance 2 miniature Ironcore motor options CS Option- 4 pole producing 4 N cont., 12 N peak CD Option - 8 pole producing 8 N cont., 24 N peak Again the mSR 80 uses one of two different ironcore linear motors, either the CS option or 4 pole motor or CD option or 8 pole motor option, with thrust versus speed performance as shown above.

mSR 80 Encoder Options Magnetic incremental with 1 micron resolution Magnetic Read Head Optical Read Head Magnetic incremental with 1 micron resolution Highly economical feedback option Optical incremental resolutions of 1.0, 0.1, and 0.01 micron Sine/Cosine output Resolution determined by drive interpolation The mSR 80 is available with five different linear encoder options. The first is a new magnetic incremental encoder which is a very economical feedback option for generic positioning applications. Next is an optical incremental option with 3 different resolutions of 1.0, 0.1 or 0.01 micron resolutions. Lastly the mSR 80 also offers a sine cosine encoder output. This can be very economical high resolution option, when paired a drive that can accept this signal, as its resolution can be scaled by the drives interpolation characteristics.

Magnetic Counter Balance The mSR 80 – 25 mm stroke only Standard options for magnetic counterbalance Must be sized per load Improved design over pneumatic as it requires no energy. Ideal for focusing applications Pictured here is the 25 mm stroke, mSR 80 positioner with integrated magnetic counterbalance. This counterbalence is ideal for Z axis applications, like an auto-focus operation. This counter balance must be sized to the payload that the vertical axis will see. This is an ideal vertical axis solution over typical pneumatic counterbalances as it requires no compressed air or tubing that goes along with it.

mSR 80 Versus MX80L Similar in total volume at a given stroke MX80L 25 mm stroke Fully extended The mSR 80 fits a similar volume that would have been taken up by an equivalent stroke MX80L, pictured here is and mSR 80 with 25 mm stroke fully retracted, along side an MX80L with 25 mm stroke fully extended. As you can see the two take up a very similar amount of machine space. mSR 80 25 mm stroke Fully retracted

mSR 80 Versus MX80L Positioner Length (mm) Travel* (mm) Motor Pole MX80L Length mSR080L-025CS 128 25 4 114.5 mSR080L-035CS 138 35 - mSR080L-050CD 183 50 8 147 mSR080L-100CD 265 100 260 mSR080L-150CD 365 150 360 The mSR 80 is 80 mm wide by 25 mm high, the same dimensions as the MX80L. When comparing the length of the mSR to the MX80L you can see that they are very similar. MX80L mSR 80 25 mm 80 mm 80 mm

Square Rail Versus Cross Roller? Cross rollers bearings have long been touted as superior precision bearing over that of recirculating… but is this still the case? Square rail technology has improved significantly over time Eliminates the need to preload the stage, yielding a truer stage Now you might be surprised when you learn of the performance advantages of the mSR’s square rail design over that of the cross roller design of the MX80L, as cross roller bearings have long been touted as having superior performance over recirculating bearings. Square rail production has improved drastically over time resulting in a highly competitive bearing technology. In addition to being faster to assemble, the square rail eliminates the need to preload the stage, yielding a truer stage with stiffer characteristics.

Square Rail Versus Cross Roller? Manufacturing: All linear guide bearing rails are machined via grinding process For 20 years use of linear square rails has increased (ease of use, breath of product) Driven the manufacturing of square rails to attain the same straightness/flatness as a cross roller element Now all linear rail guides are grinded the same via a precision machining process. Leaving the only real difference being the bearing elements themselves. Earlier recirculating or square rail technologies did not use optimized bearing pathways, resulting in vibration as each truck translated. Higher quality rails today have minimized and almost eliminated this variation. Demand for this bearing has also driven improvements in the straightness and flatness performance, while driving down cost.

Square Rail Versus Cross Roller? Difference in preloading Cross Roller: stage is loaded – flexing the carriage. Square Rail: each truck is preload in a consistent fashion Again the major difference in bearing technology as it pertains to the positioner has to do with how the bearing is preloaded. Cross rollers depend on deforming the material of the stage itself. Meanwhile with square rail bearings, each truck is preloaded leaving the stage material intact, and in a very true state.

mSR 100 Second size to the mSR Series Allows for smooth precision performance Uses the mL18 miniature ironless linear motor as its drive Provides the best dynamic response of any Parker positioner Designed with latest encoder technology on board Next is the mSR 100 which uses the mL18 ironless linear motor as its drive. This ironless linear motor allows for high dynamic performance and yields very smooth motion. Like the mSR 80 the 100 has been designed to also use the latest encoder technology available.

mSR 100 Design Features Integrated high precision square rails Center driven direct drive ironless linear motor Provide guidance, allows for superior straightness /flatness, and stiffness With zero cogging this linear motor produces extremely smooth motion, with limited velocity ripple Integrated linear encoder, home and limits Now lets examine the design features of the mSR 100. Like the mSR 80 the 100 is built atop two integrated precision square rails which provide the stage its guidance, along with its straightness/flatness and stiffness. The mSR 100 design also uses a center driven linear motor, but uses an ironless linear motor which has zero cogging allowing for very smooth motion, and limited velocity ripple. The mSR 100 allows for any one of six different linear encoder technologies, and like the mSR 80 all have limits and home sensing built into them with the exception of an BiSS-C absolute option, which doesn’t have any limits or home signals built into it. The mSR 100 has both tapped and through holes built into it, as well as bolting patterns to match that of the mSR 80, so the mSR 100 can easily be used to construct a multi-axis system with mSR 80 axes integrated to it. Six encoder options for flexible precision performance, with adjustable onboard limits and home sensing Convenient mounting holes and dowel pinning Allowing for multiple mounting options to either an other mSR100, mSR80, or MX80L

mSR 100 Stroke Performance Stroke (mm) 25 (LS) 50 (LS/LD) 100 (LS/LD) 150 200 Motor Load (kg) 12 Continuous Thrust (N) 11 11/16.7 Peak Thrust (N) 33 33/50 Maximum Speed (mm/sec) 1100 1500 3000 Maximum Acceleration (G’s) 3 Bi-Directional Repeatability (µ)1 0.2 Straightness and Flatness (µ)1 4 5 The mSR 100 is available in stokes from 25 mm all the way up to 500 mm, displayed here are general performance specification for strokes from 25 to 200 mm. Note that the continuous and peak thrust very based upon the motor option selected. The LS option yielding 11 N of continuous thrust, and a peak of 33 N, and the LD option producing 16.7 N of continuous thrust and a peak of 50 N. 1Precision grade, with 0.01 micron optical encoder

mSR 100 Stroke Performance Cont… Stroke (mm) 250 (LS/LD) 300 350 400 450 500 Motor Load (kg) 12 Continuous Thrust (N) 11/16.7 Peak Thrust (N) 33/50 Maximum Speed (mm/sec) 3000 Maximum Acceleration (G’s) 3 Bi-Directional Repeatability (µ)1 0.2 Straightness and Flatness (µ)1 5 6 8 10 And here we have the stroke performance for the longer strokes of 250 through 500 mm. 1Precision grade, with 0.01 micron optical encoder

mSR 100 Performance mL18 miniature Ironless motor options LS Option- 3 pole producing 11 N cont., 33 N peak LD Option - 5 pole producing 16 N cont., 50 N peak LS Motor Option LD Motor Option Again the mSR 100 uses Parker’s newest ironless linear motor as its drive, the mL18. The mL18 is not as thrust dense as the ironcore motor used in the mSR80, but still outputs higher overall thrust relative to it. Pictured here are the thrust speed characteristics for each option.

mSR 100 Encoder Options Magnetic incremental with 1 micron resolution Magnetic Read Head Optical Read Head Magnetic incremental with 1 micron resolution Highly economical feedback option Optical incremental resolutions of 1.0, 0.1, and 0.01microns Sine/Cosine output Resolution determined by drive interpolation BiSS-C Absolute For applications requiring constant feedback or zero initialization (homing) Like the mSR 80 the mSR 100 offers the 1 micron magnetic encoder as an economical encoder option, optical resolutions of 1.0, 0.1, and 0.01 micron, and sine/cosine and also offers a standard BiSS-C absolute option for applications that require constant positional feedback, or cannot allow for a homing routine.

mSR 100 Versus mSR 80 If you need relatively basic motion (5 micron repeatability) with a stroke under 200 mm, but want a very compact stage Look at the mSR80 with magnetic encoder Now let’s walk through a couple of different scenarios for when we would use one mSR or encoder over another. Let’s say for instance you’re looking for the smallest linear positioner for your application and have relatively basic precision requirements. In this scenario you’ll want to look at the mSR 80 for its size with the magnetic encoder option as it is extremely economical.

mSR 100 Versus mSR 80 If you need very precise motion in a tight package Look at the mSR 80 with optical encoder, and select the optical encoder based upon your precision needs Now let’s say you want a very small positioner with high precision. In this case you’ll want to again look at the mSR 80 but in this case you’ll want to specify an optical encoder to meet your precision needs.

What happens if I need to change my resolution? Parker has designed in the latest encoder technology to the mSR Should you select any of the optical options you can easily switch resolution by changing our the interpolator Don’t want to design yourself into a corner? Parker has designed the mSR with the latest encoder technology available. As such if you ever find that you want to change you’re mSR’s resolution and you’re using any of the optical encoders, all that is required is that you change out the optical interpolator for the desired resolution. Note that any laser data initially captured will vary. Optical Read Head Optical Interpolator Optical Tape Scale

mSR 100 Versus mSR 80 If you need very precise motion and high speed Look at either the mSR 80 or mSR 100 with sine/cosine encoder. Now lets say you want to make very precise moves, very quickly. You will want to look at either the mSR 80 or 100, with the Sine/Cosine encoder. Using this option you scale the resolution your application requires within your drive, and while not inundating the drive with the high frequency input of the 0.01 micron optical incremental option – allowing for faster overall performance.

mSR 100 Versus mSR 80 If your concerned about producing very smooth motion with tight control over velocity ripple Look at the mSR 100 with the 10 nanometer optical encoder If you’re concerned with producing very smooth motion for an application that requires very tight velocity control for scanning or output on the fly applications, look at the mSR 100 with a high resolution encoder. The ironless motor used in mSR 100 has no attractive forces between stator and magnet track yielding extremely smooth motion.

Standard Grade and Precision Grade Encoder Options Magnetic Only Optical (1, 0.1, and 0.01), Sin/Cos, and BiSS-C* Bi-Directional Repeatability (µ) 5.0 0.11 Accuracy (µ)2 20 4 Straightness & Flatness (µ)2 8 3 Metrology Test Report No Yes Slope Correction The mSR is available in both a standard grade using the economical 1 micron magnetic encoder or precision grade using any of the other encoder options – optical, sine/cosine or BiSS-C absolute with in the mSR 100. Precision grade versions of the mSR are tested via Parker’s laser interferometer, and shipped with full laser test results and linear slope corrected value. *BiSS-C Absolute option available on mSR100 only. 110 nanometer encoder 225 mm stroke

Compliance CE and RoHS Both mSR 80 and 100 are fully CE and RoHS compliant as standard. All options are both RoHS and CE as standard on any mSR 80 or mSR 100.

Servo Drive Compatibility mSR Series (Motor Option) mSR 80 (CS Option) (CD Option) mSR 100 (LS Option) (LD Option) Continuous Current (Arms) 0.8 1.6 1.2 2.18 Peak Current (Arms) 2.4 4.8 3.5 6.5 P-Series1 PD-04 ViX2 ViX250*H IPA1,2 IPA04-HC Note that there are a variety of complimentary drive options available through parker, based upon you application as well. 1DC Version Required 2Incremental Feedback Only

Multi-Axis Systems Given the modular design of the mSR it can easily be adapted to create multi-axis systems mSR 80 to 80 (same bolt patter as the MX80L) The mSR can easily be adapted to fit any number of multi-axis systems. For instance the mSR 80 can easily be configured into XY systems without the use of transition plates. Note that it uses the exact same bolt pattern as the MX80L making it a bolt in replacement for most applications. mSR 80 XY System

Multi-Axis Systems mSR 100 to 100, in two methods Standard XY Carriage to carriage mounting (eliminates cable carrier) The mSR can be adapted to a multi-axis system again, without the need for transition plates in either a standard XY orientation, or by mounting each carriage to carriage – limiting the cable management required. mSR 100 Carriage to Carriage XY mSR 100 Standard XY

Multi-Axis Systems The mSR 80 can also be directly mounted to the mSR 100 Consult the catalog for standard z-axis brackets for the mSR 80 and 100 As you might expect the mSR 80 can also be mounted directly to the mSR 100, note that standard Z brackets can be ordered from the catalog for vertical mounting of the mSR 80. mSR 80 Z mounted to a mSR 100 X

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Product Series Now let’s review part number configuration for the mSR. First we have the product series denoted mSR

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 mSR Size: -80 -100 Next select the size either the 80 or the 100

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Linear Motor Drive Next L for Linear motor drive

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Stroke Length Option 025 – 25 mm stroke 035 – 35 mm stroke* 050 – 50 mm stroke 100 –100 mm stroke 150—150 mm stroke 200 – 200 mm stroke** 250 – 250 mm stroke** 300 –300 mm stroke** 350—350 mm stroke** 400 – 400 mm stroke** 450 – 450 mm stroke** 500 –500 mm stroke** *mSR80 only **mSR 100 only Then select the stroke in mm. Discrete values only as listed.

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Grade Option Precision Standard Then select whether you’d like the standard or precision grade. Again the standard grade is the only available option with the magnetic encoder technology, and precision grade is only available with the optical, sine/cosine or BiSS-C absolute.

mSR Part Numbering MSR100L050PLCDE3H1L1CM03X0 Motor Option CS –ironcore, single* CD –ironcore, double* *mSR 80 only LS –ironless, single** LD –ironless, double** **mSR 100 only Then select the appropriate motor option, again note ironcore is only available with the mSR80, and ironless with the mSR100

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Encoder Option E1 – 1 micron optical incremental E2 – 0.1 micron optical incremental E3 –0.01 micron optical incremental SC –Sine/Cosine M1—1 micron magnetic incremental R1- 0.05 micron BiSS-C Absolute* *mSR 100 only Next select the encoder option.

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Home Sensor Option H0 – No Home Sensor H1 –Home Sensor Home and limit options

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Limit Sensor Option L0 –No Limit Sensor L1 –End of travel limit sensors

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Cable Options CM01 – No Cable management, 1 meter* CM03 – No Cable management, 3 meter CM13 – Single Cable Carrier, 3 meter** CM23 – Double Cable Carrier, 3 meter** *mSR 80 only **mSR 100 only Then select your cable and cable management options

mSR Part Numbering MSR100L050PLDE3H1L1CM03X0 Other Options X0 – No options X1 – Magnetic Counterbalance (0.5 N) X2 - Magnetic Counterbalance (2.0 N) X3 – Magnetic Counterbalance (3.0 N) X4 - Magnetic Counterbalance (3.5 N) X5 – Magnetic Counterbalance (4.3 N) X6 - Magnetic Counterbalance (6.3 N) *mSR 80 - 25 mm stroke only Last is an option for a magnetic counterbalance that can be added to mSR80 with 25 mm stroke.

Questions or Inquiries EMN_support@parker.com 1-800-358-9070 This conclude this video presentation. Please direct questions or inquiries to the email address or phone number listed above. For information on the mSR or any of the other products offered by Parker, visit us at Parkermotion.com.