Fundamentals and Applications of Vacuum Microelectronics

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Presentation transcript:

Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A

Outline Introduction Field emission basics Spindt emitters and arrays Beyond Spindt emitters Field emission display Summary

Introduction (I) What is vacuum microelectronics [Ref. 1] [Ref. 1]

Introduction (II) Good Bad Power handling ability Ballistic and coherent transport Resistance to radiation-induced defects Bad Fabrication difficulties Packaging issues

Field emission basics F-N equation [Ref. 2]

Spindt emitters and arrays (I) Assuming field emission onset E ~ 1x107 V/cm Classical processing: R = 1mm , r = 2000Å β = 5x104 / k cm-1  V = 1000 V Micro-fabrication: R = 5000Å, r = 250Å β = 4x105 / k cm-1  V = 100 V E = β V E: electric field ( V/m) V: applied voltage (V) β = R / (k r ( R – r )) ~ 1/ (k r ) when r << R [Ref . 3] k: const. 1 < k < 5

Spindt emitters and arrays (II) [Ref. 3]

Spindt emitters and arrays (III) Fields of a triode structure [Ref. 4]

Spindt emitters and arrays (IV) Structure parameter dependence [Ref. 5]

Spindt emitters and arrays (V) [Ref . 3] Before: ΔΦ = 1 eV Σ ~ 0.1% After: ΔΦ = 0.2 eV Σ ~ 20-40% [Ref . 6]

Beyond Spindt emitters (I) Problems with simple Spindt emitters Contamination Focusing Uniformity of array fabrication Power consumption

Beyond Spindt emitters (II) Solutions Metal-Insulator-Metal (MIM) emitters Surface Conduction Emitters (SCE) Diamond-coated emitters Carbon nanotube emitters

Field emission display (I) [Ref. 8] [Ref. 7]

Field emission display (II) Large array [Ref. 9] Beam focusing [Ref. 3]

Field emission display (III) Spacers breakdown [Ref. 3] Getters [Ref. 3]

Field emission display (IV) [Ref. 3]

Field emission display (V) [Ref. 3]

Summary An interesting device family Special design/fabrication considerations Complementary to conventional solid-state devices Important applications

References [1] C. A. Spindt et al., J. Appl. Phys., 47 (1976) 5284 [2] F. Charbonnier, Appl. Surf. Sci., 94/95 (1996) 26 [3] W. Zhu, Vacuum Microelectronics, John Wiley & Sons, 2001 [4] W.Dawson et al., J. Vac. Sci. Tech. B, 11(2),(1993) 518 [5] E. G. Zaidman, Trans. Electron Dev., May 1993, 1009-1016 [6] K. L. Jensen, Naval Res. Lab.: Cathode Workshop, 2001 [7] http://www.pctechguide.com/07panels.htm [8] T. S. Fahlen, Proc. IVMC, 1999, p. 56 [9] T. T. Doan et al., US patent 5229331, 1993