EasyGem™2.4 Technology Summary for SECS Communication Easy, Fast and Reliable Equipment FA Control Solution

Introduction HOST FAB Network EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments. GEM CTC PMC PMC I/F PMC PMC Machine TMC Intra-tool Network Easycluster

Advantages Easy to build Easy to extend Easy to debug : Defined using Configuration File or GUI Easy to extend : GEM Definition options to change functionality. ( ex : 200mm <-> 300mm, Increased Modules ) Easy to debug : Comprehensive history and communication data logfiles ( Host<->Gem, Gem<->Equip, Error, Debug Message file ) High Reliability and Flexibility : Multiple OEM installs in varied End User facilities

Features 200mm/300mm FA Scenario Support Full Gem Scenario Support : 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario Full Gem Scenario Support : Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement Max 64 Process Module Support : PPID, CEID User ID Definition : Maximum 3000 : ID => SVID,CEID,ECID,RCMD,ALID TEPAS Support : TEPAS( Samsung : Total Equipment Prediction Analysis System ) 1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported Variable and Flexible Option : User can configure Option as Fab Request and Equipment System,

User Configuration Files ALID.cfg : Alarm ID Registry File( link with Equipment Alarm Number ) CEID.cfg : Collection Event ID Registry File( includes Kornic Provision Event ) ECID.cfg : Equipment Constant ID Registry File( link with Equipment Parameter IO ) SVID.cfg : Status Variable ID Registry File( link with Equipment Status IO ) RCMD.cfg : Remote Command Registry File( includes Kornic Default Command ) Recipe.cfg : Process Program ID Registry File( link with Process Module Recipe Item ) System.cfg : EasyGem Option Configuration File

Debugging Files SECS Message Log File Report/Event ID Log File : All messages between Host and Equip. are saved. File is created at 1 hour intervals Report/Event ID Log File : Can show ReportID/Event from host in GUI. The information remains persistent, no need to reload Equipment Execution Log File : Command and Event messages between Gem and Equipment Gem Analysis Error Log File : If message from host has an error( syntax, format, reject situation ), the analysis error message is saved. Communication History and Error Log File : Ethernet Port Open Fail and Host Communication Start/End Time

Architecture Configuration System CEID RCMD SVID PP Body Host ALID Alarm Manager System CEID RCMD SVID PP Body Configuration IO Manager CTC Application1 Application2 GUI PMC / TMC . Easycluster H/W Format Unformat Analysis Event Execution Data gathering EasyGem Log File Spooling Debug Log SECS2 Message Comm Communication Task Host ALID SECS2 Format UnFormat Task

System Requirements Control System OS FA Pre-test Tool Pentium III or Higher, min. 128 MB RAM Monitor : SVGA (1,024 768) LAN Card OS : Window NT 4.0 Workstation, Windows 2000, Windows XP FA Pre-test Tool : SECSim Pro™ (GW Associates, Ver2.0)

Generic Equipment Model(GEM) State Models : Process, Communication, Alarm, Control, Material Movement, Spooling Establish Communications : Communication State Display in GUI, Timer Constants, Comm. Enable/Disable Data Collection : Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req. Alarm Management : Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request Remote Control : Control Event, Control Status Variable, State Display, Appropriately Accept/Deny Equipment Constants : Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request

Generic Equipment Model(GEM) Process Program Management : Host Upload/Download/Delete/Directory request, Process Program Verification Material Movement : Port/Wafer Status, Completion Time Equipment Terminal Services : Single/Multi Block, Message Display in GUI Error Messages : Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout Clock : Equipment Clock Request/Set Spooling : Non-Volatile Storage, Spool Status and Display

Supported SEMI Standards SEMI E5-0301 SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI E30-1000 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37-0298 High-Speed SECS Message Services (HSMS) Generic Services SEMI E37.1-96E High-Speed SECS Message Services Single – Session Mode (HSMS-SS) SEMI E39-0600 Object Services Standard : Concepts, Behavior, and Services (OSS) SEMI E40-0301 Standard for Processing Management (PJM) SEMI E42-0299E Recipe Management Standard: Concepts, Behavior, and Service(RMS) SEMI E84-0301 Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO) SEMI E87-0301 Provisional Specification for Carrier Management (CMS) SEMI E90-0301 Specification for Substrate Tracking(STS) SEMI E94-1000 Provisional Specification for Control Job Management(CJM) SEMI E99-1000E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

Supported Stream & Function Msgs. Primary Function S1 F1,F3,F11,F13,F15,F17,F76 S2 F13,F15,F17,F23,F25,F29,F31,F33,F35,F37,F39,F41,F43,F45,F47 S3 F1,F3,F17,F23,F25 S5 F1,F3,F5,F7 S6 F1,F3,F9,F11,F23 S7 F1,F17,F19,F23,F25,F27,F29,F65 S9 F1,F3,F5,F7,F9,F11,F13 S10 F1,F3,F5,F9 S14 F1,F3,F9,F11 S16 F1,F5,F7,F9,F11,F13,F15,F17,F19,F21,F23,F25,F27,F29 S18 F5,F7,F9,F11,F13

Semi Standard Compliance ( E5-0301/SEMI E30-1000/SEMI E39-0600 ) GEM COMPLIANCE STATEMENT Fundamental GEM Requirements GEM Section Implemented GEM-Compliant State Models 3.0, 3.1, 3.3 Yes No Yes (See NOTE 1) No Equipment Processing States 3.4 Host-Initiated S1=F13/F14 Scenario 4.1.5.1 Event Notification 4.2.1.1 On-Line Identification 4.2.6 Error Message 4.9 Documentation 8.4 Control ( Operation Initiated) 4.12(except 4.12.5.2) Additional Capabilities  (See NOTE 2) Establish Communications 4.1, 3.2 Dynamic Event Report Configuration 4.2.1.2 Variable Data Collection 4.2.2 Trace Data Collection 4.2.3 Status Data Collection 4.2.5 Alarm Management 4.3 Remote Control 4.4 Equipment Constants 4.5 Process Program Management 4.6 Material Movement 4.7 Equipment Terminal Services 4.8 Clock 4.10 Limits Monitoring 4.2.4 Spooling 4.11 Control (Host-Initiated) 4.12.5.1

Semi Standard Compliance PM COMPLIANCE STATEMENT Fundamental PM Requirements PM Section Implemented PM Compliant Single Process Job Execution 8.2  Yes No  Yes No Process Job Milestones 8.2.1 (except 8.2.1.2, 3) Process Job Failure Indication 8.2.1.7 Abort Command 8.2.3.2 Process Job Object Implementation 8.3, 9 Reject Invalid/Incomplete Parameter 8.2.1.2.1 Reject Unsupported Capabilities 11.2 Services Implementation (not per Additional) 10 Yes  No Resource Pre/Post-conditioning   Stop, Pause and Resume Commands 8.2.3.3, 4, 5 Manual Process Start 8.2.3.9 Process Job Queuing 8.3 Process Tuning 7.5, 10.4.9 Processing of Material Groups 7.6  Yes  No Multiple Concurrent Process Jobs 7.7 Multiple Consecutive Process Jobs 7.8 Process Job With No Material 7.9 Event Notification 8.2.2 Enhanced Job Creation 10.4.2 Multiple Job Creation 10.4.3 Duplicate Job Creation 10.4.4

Semi Standard Compliance CMS COMPLIANCE STATEMENT Fundamental CMS Requirements CMS Section Implemented CMS Compliant Load Port Number 9.1 ■Yes No Carrier Slot Number 9.2 Load Port Transfer State Model 9.3 – 9.4.3 Carrier Object Implementation 10 Load Port Reservation State Model (internal buffer equipment) 12 Yes ■No Load Port/Carrier Association State Model 13 Carrier ID Verification Support 14.2 Slot Map Verification Support 14.3 Services Implementation 16 Additional Events Implementation 18 Variable Data Definitions 19 Alarms Implementation 20 Additional CMS Capabilities Load Port Reservation State Model (fixed buffer equipment) Reservation Visible Signal 12.2

Semi Standard Compliance STS COMPLIANCE STATEMENT Fundamental STS Requirements STS Section Implemented STS Compliant Substrate Tracking 8 (except 8.4) ■Yes No Substrate Object and State Model 9 Substrate Location Object and State Model 10 Service Message Implementation 11 Variable Data 12 Events 8.4 none  

Semi Standard Compliance CJM COMPLIANCE STATEMENT Fundamental CJM Requirements CJM Section Implemented CJM Compliant Control Job Object 8 ■Yes No Control Job State Model 9 Control Job Queue Model 10 Carrier Properties 11 Service Message Implementation 12 Variable Data 13 Yes ■No Events 7.3.2 Additional Requirements 14

Related Screens ( Gem Communication )

Related Screens ( Gem Configuration )

Related Screens ( Host Communication )

Related Screens ( Job Manager )

EasyGem Install Base Equipment Size Numbers Country/End User Control Type (SECS2,GEM,HSMS) CVD 200mm 4 Korea/Samsung 200mm Gem Scenario 300mm 1 Taiwan/PSC 300mm Job Control Scenario RTP 7 Asher 3 Taiwan/XXX Korea : 200mm Extension Gem Scenario Taiwan : 300mm Job Control Scenario Track 5 Korea/Dongboo