Novel type of fabrication tactile sensor made from artificial hollow fiber Y. Hasegawa, M. Shikida*, D. Ogura, K. Sato Department of Micro-Nano Systems Engineering, *EcoTopia Science Institute, Nagoya University, Japan MEMS 2007 pp.603~606 Advisor ： Cheng-Hsien Liu Reporter ： Yu-Sheng Lin Date ：

PME52302 Outline Introduction Design and principle Fabrication Results Conclusion

PME52303 Introduction Structure made by weaving hollow fiber Detect 2D contact-force Measuring the capacitor change Applications of a fabric tactile sensor Ref: E.Hwang, 2006

PME52304 Design Schematic view of a fabric sensor

PME52305 Operation principle Schematic view of its operation principle

PME52306 Fabrication Fabrication process of the fabric tactile sensor Nagayanagi Co Ltd.

PME52307 Fiber element and fabric tactile sensor （ c ） Fabric tactile sensor using only artificial hollow fibers （ b ） Fabricated artificial fiber （ a ） Cross-section view of fiber

PME52308 Fabric tactile sensor

PME52309 Experimental setup Pin ： D=1.5mm

PME Results The performance of a pair of warp and weft fibers

PME Results (cont.)

PME Results (cont.)

PME Conclusion The editors proposed an artificial hollow fiber structure as a new material for MEMS and applied it to create a novel type of fabric tactile sensor. The editors found the capacitance between the two fibers increases with increasing applied load.

PME Thank you for your attention !