Silicon makes up 25.7% of the Earth's crust. Most of it is in the form of silicon dioxide, also known as silica: Sand, amethyst, agate, quartz, rock crystal,

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Presentation transcript:

Silicon makes up 25.7% of the Earth's crust. Most of it is in the form of silicon dioxide, also known as silica: Sand, amethyst, agate, quartz, rock crystal, chalcedony, flint, jasper, and opal Diamond cubic crystal structure.

Czochralski single-crystal growth process Bridgman-Stockbarger technique

less than Torr ~ Torr 3. W.T. Tsang, “From Chemical Vapor Epitaxy to Chemical Beam Epitaxy”. J. Cryst. Growth. 95, 121 (1989)

Silicon band gap energy at 300 K = 1.12 eV = 1107nm

Phonon (lattice) scattering. Angle between and planes is 54.7 degree plane

Silicon band gap energy at 300 K = 1.12 eV = 1107nm

Russell Ohl in 1939, discovered the PN barrier and is generally recognized for patenting the modern solar cell (US Patent , "Light sensitive device"). p side is higher doped. Donors: group V Phosphorus (P) Arsenic (As) Acceptors: group III Boron (B) Aluminium (Al)

Dose and energy requirements of major ion implantation applications (species shown roughly in order of decreasing usage). D=D0*exp(-E A /kT) ElementD [cm 2 /s] (RT)D [cm 2 /s] (1.3kK) B E E-13