Microelectronics Processing Course J. Salzman Fall 2006 1 Microelectronics Processing Course Introduction.

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Presentation transcript:

Microelectronics Processing Course J. Salzman Fall Microelectronics Processing Course Introduction

Microelectronics Processing Course J. Salzman Fall

3 Conductivity in solids Resistivity  [  cm] Conductivity  [  cm] Ag Cu Al Glass Pure Diamond Quartz Si Semiconductors Conductors Insulators GaAs

Microelectronics Processing Course J. Salzman Fall History 1904 Vaacum Tube 1925 Concept of Field Effect Transistor 1947 Bipolar Transistor 1958 Bipolar IC 1959 MOS Transistor 1961 IC-MOS Technology 1972 MOS Microprocessor

Microelectronics Processing Course J. Salzman Fall

6

7 Moore Law (Gordon Moore 1965) The number of transistors in a chip will be doubled every 18 months

Microelectronics Processing Course J. Salzman Fall

9

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Microelectronics Processing Course J. Salzman Fall MOS Transistor Source Drain Gate

Microelectronics Processing Course J. Salzman Fall MOS Transistor Source Drain Gate Electrons in inversion layer

Microelectronics Processing Course J. Salzman Fall Drain Gate Source W L t ox Substrate Metal contact Schottky contact Si 2 O

Microelectronics Processing Course J. Salzman Fall Optical Measurements Photometric Interferometric Polarization Spectroscopic

Microelectronics Processing Course J. Salzman Fall Basic Optical Instruments Microscope Reflectometer (Nanospec) Ellipsometer

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall

Microelectronics Processing Course J. Salzman Fall