SU-8 surface- micromachining process utilizing PMGI as a sacrificial material 2007 IEEE MEMS G. Foulds, R. W. Johnstone M. Parameswaran 學號 : 姓名 : 陳立仁

Outline  Introduction  Fabrication process  Result  Conclusion

Introduction  A novel process uses PMGI as sacrificial layer and lift-off resist for SU-8.  The whole process can be completed in a single day.

Fabrication process

Fabrication process (cont.)

Result

Result (cont.)

“ Automated assembly of hingeless 90° out-of-plane microstructures, ” S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

Result (cont.) “ Automated assembly of hingeless 90° out-of-plane microstructures, ” S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

Conclusion  An ideal process for proof of concept prototyping.  The height and thickness of the structure can be changed easily to fit different applications.