SPRAY COATER REPORT Pierre Ponce 4/15/2010

Operation The AccuMist nozzle is NOT centered when the head is at the 0 angle position – Tested using Center Test Recipe. – Centered when the indicator is halfway b/w 0 and the next tick towards the back of the machine. Center test also fails unless the swivel arm if first homed and then moved to parkposition.

Recipes P16-P32 Resist Blend  SPR220-7:MEK:EL (1:8:5) All wafers are clean, flat silicon (L-test) 150  C singe oven before spraying Chuck at 65  C and wafers sit for 30 seconds before each (CCW spin, CW spin) pair of coats Chuck spins at 80 RPMs After recipe ends, vacuum hotplate at 90  C for 120secs (done at svgcoat) Swivel arm height fixed at Swivel arm speed profile derived from Matlab script (13 steps from edge to edge), starting at 265 steps/sec

Variables Nozzle pressure (400, 600, 800, 1200, 1600 mTorr) Number of passes (6, 10, 12) Dispense rate (10, 6, 5 uL/s)

Observations #Passes  (or Dispense rate  )  Standard deviation  Pressure   Roughness  (maybe) Pressure   Center thickness  Pressure   Edge thickness  Spin rate   Edge roughness  – (tested 1 wafer at 50 RPM, recipe P31) High speed at edge seems bad for roughness… Possible solutions – 1. Less chuck spin rpm and/or – 2. Scale down swivel arm speed

Next Tests Less RPMs Reduce arm speed by 0%, 25%, 50% Fix #passes to 12 Use 1200 mTorr as min pressure up to 1600 Raise chuck temperature to 75  C Standard topography tests (are there standard topography wafers available?)