PME5230 Midterm Presentation 1 Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator Teacher ： Reporter.

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Presentation transcript:

PME5230 Midterm Presentation 1 Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator Teacher ： Reporter ： Chien Thanh Nguyen Teacher ： Cheng-Hsien Liu Reporter ： Chien Thanh Nguyen Date ： M.Koskenvuori 1, V.Kaajakri 2, T.Mattila and I. Tittonen 1 1.Micro and Nanosciences laboratory and Center for New Materials, Helsinki University of Technology,Finland 2. VTT – Technical Research Center of Finland, Finland MEMS 2008, Tucson, AZ, USA, January 13-17, 2008

PME5230 Midterm Presentation 2 Outline Introduction Device Method Measurement results Discussion Conclusion

PME5230 Midterm Presentation 3 Introduction Temperature induced drift MEMS resonator Compensated electronically Material compensation SiO 2, Al 2 O 3

PME5230 Midterm Presentation 4 Device Single crystal silicon, square-extensional bulk- acoustic-mode resonator (SE-BAW) Fundamental mode of vibration Lame ’ Mode Square-extension mode

PME5230 Midterm Presentation 5 Method Determine temperature coefficients of the frequency of two mode α 1 = ((df/f)/dT) lame = ppm/K α 2 = ((df/f)/dT)SE = ppm/K

PME5230 Midterm Presentation 6 Method (1) (2)

PME5230 Midterm Presentation 7 Measurement Results Experiment setup 1) Pt-100 sensor next to resonator chip 2) Resonator as a thermometer itself

PME5230 Midterm Presentation 8 PT-100: frequency error: 15ppm PT-100: compensation error df/f > 2 ppm Resonator thermometer: compensated df/f < 1 ppm

PME5230 Midterm Presentation 9

10 Discussion Disadvantage: 1) A very accurate frequency measurement is needed 2) The beat frequency of the two modes is fairly high reducing the sensitivity 3) Any mixing products of the two excited modes will degenerate the reference oscillator noise performance

PME5230 Midterm Presentation 11 Conclusion A resonator can be used as a thermometer by measuring the frequency change of the Lame- and SE- mode Temperature induced frequency shift can be compensated to better Provide a cost effective way to obtain crystal oscillator (TCXO) performance with inexpensive silicon resonator.

PME5230 Midterm Presentation 12 Thank you for your attention!

PME5230 Midterm Presentation 13 Reference CMOS-compatible dual-resonator MEMS temperature sensor with mili-degree accuracy C.M. Jha, G. BAhl, R. Melamud, S.A. Chandorkar, M.A. Hopcroft, B. Kim, M. Agarwwal, J. Salvia, H. Mehta and T.W. Keny (transducer 2007)