Remote MEMS Simulation, Testing and Design A Next Generation Internet Incubator James Demmel CITRIS Chief Scientist

Remote MEMS Simulation, Testing and Design MEMS = MicroElectroMechanicalSystems Core CITRIS Sensor/Actuator Technology Goal: Make tools for designing MEMS available to remote users –Simulation, Fabrication, Testing –Academic and Industrial users (thousands) Leverage large investment in networking and unique facilities at UCB and elsewhere

BSAC Microscopic Stroboscopic Interferometer (Muller, Rembe, BSAC, UCB)

Adaptive Optics MicroMirror (Muller, Rembe, BSAC)

SUGAR (Pister, Demmel, Govindjee, Agogino, Gu, Bai) MEMS Simulation Tool, inspired by SPICE Available as Web service on Millennium Currently 100s of users Ex: Laterally actuated torsionally suspended micromirror

Matisse Project (DARPA) Provide remote access to unique and mostly MEMS facilities for large user community Provide central facility (MEMS Exchange) to organize national networkof MEMS testing sites Use SuperNet infrastructure DARPA supported (UCB, LBL, CMU, MIT, CNRI, ISI, Sarnoff)

Current MEMS Exchange Fabrication Sites and Participating Sites Fabrication Sites Under Contract: –Academic: University of California at Berkeley Stanford University Cornell University University of Michigan Case Western Reserve University University of Illinois LSU/Center for Advanced Microstructures and Devices (expected soon) –Commercial: Analog Devices Teledyne Electronics Microwave Bonding Inc. Integrated Sensing Systems (ISSYS) Sony Semiconductor Tactical Fabs, Inc. Zygo TeraOptics, Inc. Advanced MEMS Optical, Inc. ASML Lance Goddard Assoc. Intelligent Micropatterning, LLC 1100 registered users

SuperNet Notes: Site/network connection operational Site/network connection expected to be operational soon Site/network connection down due to NTON network turn down Peering with other networks

Matisse Site Connections

Needs and Potential Impact West Coast down because NTON down –Even if NTON were up, if would not reach all potential users How many users? –Currently 1100 registered MEMS Exchange users –Hundreds of SUGAR users –More signed up (UCD, UCLA, Stanford, BSAC industrial affiliates) –Intend to export as educational facility Large potential user base, high leverage Requirements –Move and store 80 GB data files –Raw data from experimental platforms up to 300MBs/ –Real time data from UCB Interferometer = 80 MB/s –Real time control of experiment => ?? Latency Impact –Greatly expand MEMS community

A Next Generation Internet Incubator CommerceNet-funded NGI – At Bancroft/Shattuck in shared CCIT space – Companies will incubate and collaborate with CITRIS faculty and students –Kalil, Demmel, Sastry, Teece (advisors) – Companies chosen for closeness to CITRIS Mankoff working with Pangea on access for people with disabilities Resources available, contact Tom Kalil