What does the EUV and thin film group do? 1.Optical properties of matter in the EUV and Soft X-rays 2.Thin film preparation and characterization  Allred.

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Presentation transcript:

What does the EUV and thin film group do? 1.Optical properties of matter in the EUV and Soft X-rays 2.Thin film preparation and characterization  Allred N Meeting M N288 ESC Thin Films for Mirrors  Turley N Meeting F N308 ESC- VUV and EUV Spectrometers  L V Knight N Tues C389 BNSN (Linford)  EUV Spectrometer

Roentgen discovers x rays

Where do the EUV and Soft X-rays fit? Characteristics – interact strongly with all matter –Human hair is 100 micron. –Characteristic absorption length is 0.01 to 0.1 micron –Refractive index is ~1 How do you make optical elements to focus and direct light?

Why Extreme Ultraviolet (EUV) and Soft X-Rays? Images from and EUV Lithography (making really small computer chips) Thin Film or Multilayer MirrorsEUV Astronomy The Earth’s magnetosphere in the EUV Soft X-Ray Microscopes BYU EUV Optics April 19, 2004

Other Applications Astrophysics Surface studies. Plasma studies- matter under extreme conditions Microelectronics Soft x-ray microscopy

BYU Work Applications Astrophysics: –Image satellite –Uranium and Thorium for the EUV. Microelectronics: Stabilizing Mo/Si Also Ru, Soft x-ray microscopy: Sc and others. Surface and Nanofabrication studies. –How to be clean in an unclean world. –Ambient temperature oxidation of materials Group meetings: N209 –Sub: N308 (Turley) BYU Spectrometer.