Dolan Bridge Zoom Show. Optical Bridge Zoom Show.

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Presentation transcript:

Dolan Bridge Zoom Show

Optical Bridge Zoom Show

Post Liftoff Zoom Show

Working Optical Dolan Bridge Process Spin on LOR20B 3000 rpm 45 s Bake 150 C for 2 minutes on hotplate Spin on S rpm 45 s Bake 115 C for 1 minute on hotplate Expose for 17 s with mask Develop with 1:2 MF312:DI for 105 seconds Rinse in running DI for 15 seconds Blow off with nitrogen

Working Optical Dolan Bridge Process (continued) Double angle ±50° Aluminum evaporation Liftoff in 60° Nano Remover PG for minutes Spray with methanol to clean off solvent Blow off with canned air