TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY USING 20-Sim - CHANDRASEKHARAN SRINIVASAN E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation INTRODUCTION An simple one element Electro thermal mechanical actuator was modeled in 20-sim. Electrical voltage is given as input so as to get the deflection as the output. Modeled for a 3x2 ETM actuator array. The deflection output is validated with the results obtained from the reference papers. E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation ETM ACTUATORS Types of ETM actuators Single ‘hot’ arm ETM actuator Double ‘hot’ arm ETM actuator Bi-directional Vertical thermal actuator (BVTA) E 479/579 Mechatronics Modeling and Simulation

Fig.1. [1] Double ‘hot’ arm Polysilicon Electrothermal microactuator ETM ACTUATORS Fig.1. [1] Double ‘hot’ arm Polysilicon Electrothermal microactuator E 479/579 Mechatronics Modeling and Simulation

PRINCIPLE OF OPERATION Input: Electrical voltage or current Heat generation causes temperature increase Expansion of heated parts of actuator Generation of thermal stresses and mechanical force Mechanical force carries out the required mech. work PRINCIPLE OF OPERATION E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation FEA ANALYSIS E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation FEA ANALYSIS The FEA analysis using ABAQUS had to be aborted because of the following reasons: 1. Lots of errors 2. Missing out on few parameters The research on the FEA analysis will be continued. E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

20-Sim BONDGRAPH MODEL OF A SINGLE ACTUATOR E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Constant wave generator for voltage input (1-10 volts) MSe, the effort is set to the constant input signal source Gyrator to transform the effort coming in (voltage) into flow going out. r, Gyrator modulus ( or the multiplying factor to get the deflection) R, damping C, stiffness I, Moving mass of the element Integrator to get the deflection output E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

ACTUATOR ARRAY 3x2 array of actuators The width of the narrow beam is 30μm-40μm Material properties of polysilicon The effective moving mass is 6.75e-12 kg An Integrated ETM device with 3 X 2 array Ref. paper [ 4 ] E 479/579 Mechatronics Modeling and Simulation

20-Sim MODEL OF AN ACTUATOR ARRAY E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Voltage Input: 2v Deflection: 0.5537 Voltage Input: 4v Deflection: 1.7345 E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Voltage Input: 6v Deflection: 3.7476 Voltage Input: 8v Deflection: 7.0330 E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation VALIDATION OF RESULTS Voltage Input 20-Sim Results Validated result 1 0.2338 - 2 0.5537 0.55 3 1.0401 1.1 4 1.7345 1.76 5 2.5079 2.53 6 3.7476 3.74 7 5.1355 5.17 8 7.033 6.93 9 8.9619 8.8 Deflection vs Voltage plot. Ref. paper [2] Results validated in reference to the paper [2] E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation VALIDATION OF RESULTS The above plot shows the change in deflection of the actuator at different voltages E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation CONCLUSION The simulation results obtained from 20-Sim are in good agreement with the results in the reference paper [2]. The deflection results of a single ETM actuator were similar to that of the actuator array E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation EXTENSION Complete the FEA analysis on the ETM actuator and compare it with the 20-Sim results. To research on the fact that the ETM actuator gets destroyed when the applied voltage reaches 10 volts. E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation REFERENCES “Design and modeling of a MEMS bidirectional vertical thermal actuator” -Dong Yan, Amir Khajepour and Raafat Mansour “Experimentally verified procedure for determining dynamical model of the ETM MEMS structures” – Dept. of Engineering, Univ. of Texas, Arlington. “Electrothermal MEMS microengine capable of bi-directional motion” - Dept. of Engineering, Tucker Technology center, Texas “Effect of Thermal Boundary condition and scaling on Electro-Thermal compliant micro devices” – Nilesh Mankane and G.K. Ananthasuresh “System Dynamics: Modeling and Simulation of Mechatronic systems” – Karnopp, Margolis and Rosenberg E 479/579 Mechatronics Modeling and Simulation

E 479/579 Mechatronics Modeling and Simulation THANK YOU E 479/579 Mechatronics Modeling and Simulation