The Physical Structure (NMOS) Gate oxide Polysilicon Gate Al Al SiO2 SiO2 SiO2 S D Field Oxide Field Oxide n+ channel n+ L P Substrate contact Metal (G) L (S) n+ n+ (D) W Poly

3D Perspective

Fabrication Process Crystal Growth Doping / Diffusion Deposition Patterning Lithography Oxidation Ion Implementation

Fabrication- CMOS Process Starting Material Preparation 1. Produce Metallurgical Grade Silicon (MGS) SiO2 (sand) + C in Arc Furnace Si- liquid 98% pure 2. Produce Electronic Grade Silicon (EGS) HCl + Si (MGS) Successive purification by distillation Chemical Vapor Deposition (CVD)

Fabrication: Crystal Growth Czochralski Method Basic idea: dip seed crystal into liquid pool Slowly pull out at a rate of 0.5mm/min controlled amount of impurities added to melt Speed of rotation and pulling rate determine diameter of the ingot Ingot- 1to 2 meter long Diameter: 4”, 6”, 8”

Fabrication: Wafering Finish ingot to precise diameter Mill “ flats” Cut wafers by diamond saw: Typical thickness 0.5mm Polish to give optically flat surface

Fabrication: Oxidation Silicon Dioxide has several uses: - mask against implant or diffusion - device isolation - gate oxide isolation between layers SiO2 could be thermally generated or through CVD Oxidation consumes silicon Wet or dry oxidation Quartz Tube Wafers Quartz Carrier Resistance Heater O 2 or Water Vapor Pump

Fabrication: Diffusion Simultaneous creation of p-n junction over the entire surface of wafer Doesn’t offer precise control Good for heavy doping, deep junctions Two steps: Pre-deposition Dopant mixed with inert gas introduced in to a furnace at 1000 oC. Atoms diffuse in a thin layer of Si surface Drive-in Wafers heated without dopant Temp: 1000 wafers Dopant Gas Resistance Heater

Fabrication: Ion Implantation Precise control of dopant Good for shallow junctions and threshold adjust Dopant gas ionized and accelerated Ions strike silicon surface at high speed Depth of lodging is determined by accelerating field

Fabrication: Deposition Used to form thin film of Polysilicon, Silicon dioxide, Silicon Nitride, Al. Applications: Polysilicon, interlayer oxide, LOCOS, metal. Common technique: Low Pressure Chemical Vapor Deposition (CVD). SiO2 and Polysilicon deposition at 300 to 1000 oC. Aluminum deposition at lower temperature- different technique 0.1 -1 Torr Loader Pump Reactant

Fabrication: Metallization Standard material is Aluminum Low contact resistance to p-type and n-type When deposited on SiO2, Al2O3 is formed: good adhesive All wafer covered with Al Deposition techniques: Vacuum Evaporation Electron Beam Evaporation RF Sputtering Other materials used in conjunction with or replacement to Al In today’s technology are cupper and its alloys.

Fabrication: Etching Wet Etching Etchants: hydrofluoric acid (HF), mixture of nitric acid and HF Good selectivity Problem: - under cut - acid waste disposal Dry Etching Physical bombardment with atoms or ions good for small geometries. Various types exists such as: Planar Plasma Etching Reactive Ion Etching Plasma Reactive species RF

Fabrication: Lithography Mask making Most critical part of lithography is conversion from layout to master mask Masking plate has opaque geometrical shapes corresponding to the area on the wafer surface where certain photochemical reactions have to be prevented or taken place. Masks uses photographic emulsion or hard surface Two types: dark field or clear field Maskmaking: optical or e-beam

Lithography: Mask making Optical Mask Technique 1. Prepare Reticle Use projection like system: -Precise movable stage -Aperture of precisely rectangular size and angular orientation -Computer controlled UV light source directed to photographic plate After flashing, plate is developed yielding reticle

Fabrication: Lithography Step & Repeat Printing Printing

Lithography: Mask making Electron Beam Technique Main problem with optical technique: light diffraction System resembles a scanning electron microscope + beam blanking and computer controlled deflection

Patterning/ Printing Process of transferring mask features to surface of the silicon wafer. Optical or Electron-beam Photo-resist material (negative or positive):synthetic rubber or polymer upon exposure to light becomes insoluble ( negative ) or volatile (positive) Developer: typically organic solvant- e.g. Xylen A common step in many processes is the creation and selective removal of Silicon Dioxide

Patterning: Pwell mask

Patterning/ Printing SiO2 substrate

Fabrication Steps Inspect, measure Post bake Etch Develop, rinse, dry Strip resist Printer align expose mask Deposit or grow layer Pre-bake Apply PR

Fabrication Steps

3D Perspective

The Physical Structure (NMOS) Gate oxide Polysilicon Gate Al Al SiO2 SiO2 SiO2 S D Field Oxide Field Oxide n+ channel n+ L P Substrate contact Metal (G) L (S) n+ n+ (D) W Poly

Videos for Fabrication A very clear site showing each fabrication step http://www.virlab.virginia.edu/VL/MOS_kit.htm/state/related 4 min wafer production https://www.youtube.com/watch?v=AMgQ1-HdElM&list=PL8InEUrivGYt2Fze1vXsdkHDPWBP7NTXw&index=  9 min video showing IC fabrication process https://www.youtube.com/watch?v=i8kxymmjdoM  A 10 minute presentation of Global Foundries IC manufacturing process. https://www.youtube.com/watch?v=qm67wbB5GmI&index=13&list=PL8InEUrivGYt2Fze1vXsdkHDPWBP7NTXw    3 min animation of IC fabrication  https://www.youtube.com/watch?v=d9SWNLZvA8g   A 4 min very nice presentation with animation of 3D IC manufacturing  https://www.youtube.com/watch?v=YIkMaQJSyP8