An Ultrasensitive CMOS Magnetic Biosensor Array for Point-of-Care (POC) Microarray Application  Motivation: PoC biosensing requires high sensitivity, high portability, low cost and low power.  Applications: Medical Diagnosis (epidemic disease control…) Environmental Monitoring (pollution…) Bio-warfare (lethal agents detection…)  Background: Optical microarray  bulky and expensive optics. Existing magnetic sensors  external B-field and costly post- processing.  Our Approach: Frequency shift magnetic-based biosensor  No magnetic biasing and completely CMOS compatible An Ideal PoC Sensor

Sensor Mechanism and System Architecture  Mechanism: Frequency Shift of the On- chip LC Oscillator  Sensitivity Improving: Diff. Sensing and On-chip Temp Ctrl  σ∆f/f0=0.13ppm  Architecture : Down-Conversion and 8- Cell Array  Sensor SNR Optimization  DAC Tools: HFSS, Maxwell, Matlab / Ephysics / Spectre, UltraSim, Virtuso, Calibre Sensor Inductor Geometry

Chip Microphotograph and Measurement Results  Summary: 2.95mm x 2.56mm in 130nm CMOS with 165mW  Magnetic Bead Sensing: A single 1μm bead  Actual DNA Sensing: 1n-Molar magnetically labeled DNA  The Most Sensitive CMOS Magnetic Biosensor