Ksjp, 7/01 MEMS Design & Fab Overview Integrating multiple steps of a single actuator Simple beam theory Mechanical Digital to Analog Converter.

Slides:



Advertisements
Similar presentations
FORCE MEASUREMENT.
Advertisements

Professor Richard S. MullerMichael A. Helmbrecht MEMS for Adaptive Optics Michael A. Helmbrecht Professor R. S. Muller.
Lecture 2 Free Vibration of Single Degree of Freedom Systems
Design and Simulation of a Novel MEMS Dual Axis Accelerometer Zijun He, Advisor: Prof. Xingguo Xiong Department of Electrical and Computer Engineering,
Arizona State University 2D BEAM STEERING USING ELECTROSTATIC AND THERMAL ACTUATION FOR NETWORKED CONTROL Jitendra Makwana 1, Stephen Phillips 1, Lifeng.
An Introduction to Electrostatic Actuator
Project #3: Design of a MEMS Vertical Actuator Jianwei Heng Alvin Tai ME128 Spring 2005.
Physics 101: Lecture 21, Pg 1 Lecture 21: Ideal Spring and Simple Harmonic Motion l New Material: Textbook Chapters 10.1, 10.2 and 10.3.
Oscillators fall CM lecture, week 3, 17.Oct.2002, Zita, TESC Review forces and energies Oscillators are everywhere Restoring force Simple harmonic motion.
Mechanical Vibrations
CHAPTER-15 Oscillations. Ch 15-2 Simple Harmonic Motion Simple Harmonic Motion (Oscillatory motion) back and forth periodic motion of a particle about.
S M T L Surface Mechanics & Tribology Laboratory 3 rd Generation Device Design D S S S D D Driving/sensing setup allows for separate driving and sensing.
Frank L. H. WolfsDepartment of Physics and Astronomy, University of Rochester Physics 121, April 3, Equilibrium and Simple Harmonic Motion.
Physics 121, April 8, Harmonic Motion.
Ksjp, 7/01 MEMS Design & Fab Overview Quick look at some common MEMS actuators Piezoelectric Thermal Magnetic Next: Electrostatic actuators Actuators and.
Design of Low-Power Silicon Articulated Microrobots Richard Yeh & Kristofer S. J. Pister Presented by: Shrenik Diwanji.
ENSC 494 Design of a Micro-Machined Bistable Switch Group MISS: Maria Trinh Ian Foulds Sam Hu Steve Liao.
Ksjp, 7/01 MEMS Design & Fab Sensors Resistive, Capacitive Strain gauges, piezoresistivity Simple XL, pressure sensor ADXL50 Noise.
Simple Harmonic Motion Physics 202 Professor Vogel (Professor Carkner’s notes, ed) Lecture 2.
Disc Resonator Gyroscope (DRG)
Physics 101: Lecture 20, Pg 1 Lecture 20: Ideal Spring and Simple Harmonic Motion l New Material: Textbook Chapters 10.1 and 10.2.
Chapter 8 Rotational Equilibrium and Rotational Dynamics.
Feb 23, 2007 EEE393 Basic Electrical Engineering K.A.Peker Signals and Systems Introduction EEE393 Basic Electrical Engineering.
Spring Forces and Simple Harmonic Motion
Case Studies in MEMS Case study Technology Transduction Packaging
Simple Harmonic Motion
Lect.2 Modeling in The Frequency Domain Basil Hamed
Spring Topic Outline for Physics 1 Spring 2011.
Forced Oscillations and Magnetic Resonance. A Quick Lesson in Rotational Physics: TORQUE is a measure of how much a force acting on an object causes that.
Solid State Electricity Metrology
Energy of the Simple Harmonic Oscillator. The Total Mechanical Energy (PE + KE) Is Constant KINETIC ENERGY: KE = ½ mv 2 Remember v = -ωAsin(ωt+ ϕ ) KE.
Chapter 14 Periodic Motion.
Oscillators fall CM lecture, week 4, 24.Oct.2002, Zita, TESC Review simple harmonic oscillators Examples and energy Damped harmonic motion Phase space.
Case Studies in MEMS Case study Technology Transduction Packaging Pressure sensor Bulk micromach.Piezoresistive sensing Plastic + bipolar circuitryof diaphragm.
Simple Pendulum A simple pendulum also exhibits periodic motion A simple pendulum consists of an object of mass m suspended by a light string or.
15.1 Motion of an Object Attached to a Spring 15.1 Hooke’s law 15.2.
Chapter (3) Oscillations.
1 15.1Motion of an Object Attached to a Spring 15.2Particle in Simple Harmonic Motion 15.5The pendulum.
Control 1 Keypoints: The control problem Forward models: –Geometric –Kinetic –Dynamic Process characteristics for a simple linear dynamic system.
EE 5323 – Nonlinear Systems, Spring 2012 MEMS Actuation Basics: Electrostatic Actuation Two basic actuator types: Out of Plane(parallel plate) In Plane.
Simple Harmonic Oscillator and SHM A Simple Harmonic Oscillator is a system in which the restorative force is proportional to the displacement according.
Chapter 15 Oscillatory Motion.
April Second Order Systems m Spring force ky F(t) (proportional to velocity) (proportional to displacement)
11/11/2015Physics 201, UW-Madison1 Physics 201: Chapter 14 – Oscillations (cont’d)  General Physical Pendulum & Other Applications  Damped Oscillations.
Work and Energy 10.1 Machines and Mechanical Advantage 10.2 Work
Physics 201: Lecture 29, Pg 1 Lecture 29 Goals Goals  Describe oscillatory motion in a simple pendulum  Describe oscillatory motion with torques  Introduce.
Basic structural dynamics I Wind loading and structural response - Lecture 10 Dr. J.D. Holmes.
Oscillatory motion (chapter twelve)
Damped and Forced Oscillations
1 MIDTERM EXAM REVIEW. 2 m 081.SLDASM REVIEW Excitation force 50N normal to face k=10000N/m m=6.66kg Modal damping 5%
Autonomous Silicon Microrobots
1 Teaching Innovation - Entrepreneurial - Global The Centre for Technology enabled Teaching & Learning M G I, India DTEL DTEL (Department for Technology.
Physics 101: Lecture 18, Pg 1 Physics 101: Lecture 18 Elasticity and Oscillations Exam III.
Oscillations. Definitions Frequency If an object vibrates or oscillates back and forth over the same path, each cycle taking the same amount of time,
Physics 1D03 - Lecture 341 Simple Harmonic Motion ( V ) Circular Motion The Simple Pendulum.
Accelerometer approaches Measure F Compression Bending Stress/force based Piezoelectric Piezoresistive Measure x Capacitive (Optical) (Magnetic) AC DC.
Lecture 18: Elasticity and Oscillations I l Simple Harmonic Motion: Definition l Springs: Forces l Springs: Energy l Simple Harmonic Motion: Equations.
Physics 201: Lecture 28, Pg 1 Lecture 28 Goals Goals  Describe oscillatory motion  Use oscillatory graphs  Define the phase constant  Employ energy.
Physics 101: Lecture 18, Pg 1 Physics 101: Lecture 18 Elasticity and Oscillations Exam III.
Physics 101: Lecture 19, Pg 1 Physics 101: Lecture 19 Elasticity and Oscillations II Exam III.
1 10. Harmonic oscillator Simple harmonic motion Harmonic oscillator is an example of periodic motion, where the displacement of a particle from.
Mechanical Vibrations
Periodic Motion Oscillations: Stable Equilibrium: U  ½kx2 F  kx
The design of anti-vibration systems
WEEKS 8-9 Dynamics of Machinery
Micro-Electro-Mechanical-Systems
Chapter 14 Periodic Motion.
Periodic Motion Oscillations: Stable Equilibrium: U  ½kx2 F  -kx
Copyright © 2014 John Wiley & Sons, Inc. All rights reserved.
Presentation transcript:

ksjp, 7/01 MEMS Design & Fab Overview Integrating multiple steps of a single actuator Simple beam theory Mechanical Digital to Analog Converter

ksjp, 7/01 MEMS Design & Fab Limits to electrostatics Residual stress (limits size) Pull-in Gap-closing Comb drive Tooth (for comb and gap-closing) Thermal noise

ksjp, 7/01 MEMS Design & Fab Force/Area n L W

ksjp, 7/01 MEMS Design & Fab Energy-Area Ratio n L W

ksjp, 7/01 MEMS Design & Fab Inchworm Motor Design F F shoe F F shuttle V s1 V a2 V s2 V a1 shoe shuttle FF shoe Add Shoe Actuators

ksjp, 7/01 MEMS Design & Fab guides MUMPs Inchworm Motors Gap Stop Shoe Actuators Shuttle Large Force Large Structures Residual Stress Stiction shoes

ksjp, 7/01 MEMS Design & Fab Silicon Inchworm Motors 1mm

ksjp, 7/01 MEMS Design & Fab Power Dissipation of the Actuator

ksjp, 7/01 MEMS Design & Fab Springs Linear beam theory leads to K a = Ea 3 b / (4L 3 ) K b = Eab 3 / (4L 3 ) L b a FaFa FbFb

ksjp, 7/01 MEMS Design & Fab Springs Linear beam theory leads to K  a = Ea 3 b / (12L) K  z = Ea 3 b / (3(1+2 ) L) Note that T z results in pure torsion, whereas T a results in bending as well. TaTa TzTz

ksjp, 7/01 MEMS Design & Fab Spring constant worksheet Assume that you have a silicon beam that is 100 microns long, and 2um wide by 20um tall. Calculate the various spring constants. E si ~ 150 GPa; G si = E si / (1+ 2 ) = 80 GPa a 3 b= K a = K b = K  a = K  z =

ksjp, 7/01 MEMS Design & Fab Damping Two kinds of viscous (fluid) damping Couette: b =  A/g ;  = 1.8x10 -5 Ns/m 2 Squeeze-film: b ~  W 3 L/g 3  proportional to pressure Dynamics: m a + b v +k x = F ext If x(t) = x o sin(  t) then v(t) =  x o cos(  t) a(t) = -  2  x o sin(  t) -m  2  x o sin(  t) + b  x o cos(  t) +kx o sin(  t) = F ext

ksjp, 7/01 MEMS Design & Fab Dynamic forces, fixed amplitude x o -m  2 x o sin(  t) + b  x o cos(  t) +kx o sin(  t) = F ext frequency Force nn Low damping Q~10 High damping  ~10

ksjp, 7/01 MEMS Design & Fab Dynamic forces, fixed amplitude x o -m  2 x o sin(  t) + b  x o cos(  t) +kx o sin(  t) = F ext frequency Force nn increase k Increasing k raises  n but at cost of more force or less deflection  n’

ksjp, 7/01 MEMS Design & Fab Dynamic forces, fixed amplitude x o -m  2 x o sin(  t) + b  x o cos(  t) +kx o sin(  t) = F ext frequency Force nn  n’ Decreasing m raises  n at no cost in force or deflection decrease m

ksjp, 7/01 MEMS Design & Fab Dynamic forces, fixed amplitude  o -J  2  o sin(  t) + b   o cos(  t) +k   o sin(  t) = F ext frequency Torque nn  n’ Identical result for angular systems with J (angular momentum) instead of m decrease m

ksjp, 7/01 MEMS Design & Fab Mechanical Digital to Analog Converter

ksjp, 7/01 MEMS Design & Fab Basic Lever Arm Design Stops 6m6m 6m6m Folded spring support Input Beam (digital) Input Beam (analog) Output Beam (analog)

ksjp, 7/01 MEMS Design & Fab 6-bit DAC Implementation (Courtesy of Matthew Last)

ksjp, 7/01 MEMS Design & Fab Output of a 6-bit DAC 19 cycles