Introduction to Microfabrication Nick Ferrell Biomedical Engineering.

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Presentation transcript:

Introduction to Microfabrication Nick Ferrell Biomedical Engineering

Basics of Microfabrication Developed by microelectronics industry Adapted for silicon MEMS Refined for nanoscale fabrication Extended to polymer micro/nanofabrication

Basic Processing-Photolithography Coating and Exposure

Latent Image Formation Develop-Positive ToneDevelop-Negative Tone

Limits of Photolithography Minimum Features Size α Exposure Wavelength Spectrum for Hg Arc Lamp (365 and 436 nm)

Nanofabrication Excimer Lasers: KrF (248 nm) ArF (193 nm) F 2 (157 nm) X-rays, EUV (10-40 nm) E-beam: ( kV) X-ray (70 nm) E-beam (43 nm) Ito, Okazaki, Nature 408 (2000),

Polymer Micro/Nanofabrication Polymer Properties Wide range of physical and chemical properties Biocompatible Cheap Techniques Hot Embossing Injection Molding Soft Lithography - Microtransfer Molding - Microcontact Printing - Micromolding in Capillaries - Sacrificial Layer Micromolding

Hot Embossing J. Narasimhan, I. Papautsky, J. Micromech. Microeng. 14(2004),

Soft Lithography Figure 2. Chemical structure of PDMS. -Cheap -Easy -Quick -Robust Rapid Prototyping Y. Xia, G.M. Whitesides, Soft Lithography, Angew. Chem Int. Ed. 37(1998),

Soft Lithography

Microcontact Printing

Sacrificial Layer Micromolding

Multi-layer Patterning HEAT (110° C) SU8 PDMS PPMA

PDMS

OH CH 3 O 2 Plasma CH 3 OH Si O O O O PDMS Bonding