טרנזיסטורים מולקולאריים וגלאים (sensors) - מחקר טכנולוגי S. Moshe, S. Toledano, K. Finkelstein, R. Sarfaty, S. Richter, S. Stolyarova, and Y. Nemirovsky.

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Presentation transcript:

טרנזיסטורים מולקולאריים וגלאים (sensors) - מחקר טכנולוגי S. Moshe, S. Toledano, K. Finkelstein, R. Sarfaty, S. Richter, S. Stolyarova, and Y. Nemirovsky  מוטיבציה  מבנה  תהליכי עבוד  מדידות  מסקנות

תשתיות יקרות!

לגעת בגבולות הטכנולוגיות בנקודת המפגש עם הכימיה והביולוגיה.

Development of nano-transistor based on Self Assembly deposition of Biological Molecules Department of Electronics and Electrical engineering, Ort Braude College, Karmiel & Nano-science and nano-technology institute, Tel Aviv University by Shai-li Mosheadvisors: Dr. Shachar Richter Dr. Rona Sarfaty

האתגר – שילוב טכנולוגי, כימי וביולוגי. אלקטרוניקה מולקולרית טרנזיסטור ייחודי (אקלקטי) : 1.שפך ומקור טכנולוגית Si 2.תעלה ביו-מולקולרית 3.החלפת הליטוגרפיה הטכנולוגית בתהליך כימי של Self Assembly 4.שער פוטוני. Why Molecules ?

The device Si SiO 2 Si 3 N 4 Ti Au Indium-Tin-Oxide (ITO) Photo-System-I 1. Si/SiO2 (575um/200nm) substrate 2. Photo lithography 3. Ti/Au (10nm/140nm) 4. Lift off 5.50nm Silicon Nitride PECVD 6.7. Photo lithography to define: I. cavities for SAM II. vias to bottom electrodes 8. Nitride RIE AFM – 3D of a cavity Optical Microscope 1um

PS-I molecule קומפלקס חלבוני המעורב בתהליך פוטוסינתזה חמצנית

ITO Au SAM (PS-I) inside a cavity Si 3 N 4 SiO 2 Si 3D illustration light Bottom electrode Top electrode SAM Top View

Electrical measurements 2. Photo-current effect A KEITHLEY236 Olympus lamp Hal-L12V 100W

conclusions Conductance is through the molecules Gating by light – 8nm channel Full encapsulation - no performance reduction Total VLSI compatibility

Image of the 100 nL volume electrochemical chip. (a) Silicon chip contains an array of eight miniaturized electrochemical cells with external pads. Novel Integrated Electrochemical Nano-Biochip for Toxicity Detection in Water Prof. Yosi Shacham

Uncooled IR sensors: the Honeywell VOx bolometer Array: 320 * 240 Pixel: (30-50 )* 50 micron NETD ~ 30 mK (Optics) Cost < $ 2 K 2%