02-June-2003 Aseem Talukdar Department of Physics University of Cincinnati Cincinnati-OH Fabrication of 2D electron System by MBE and QHE
2 D electron System MBE technique QHE Outlines:
2D electron System E n =(n+1/2) ħ c + g + z c =eB/ m* nk (r)~ n (y+c p x /eB) e i(k x x+k z z) Density of States ::
Potential well of width d ~ 2 ħ 2 /(2md 2 ) for 2D behavior k B T < d ~ 10 nm T~130 K E~100 meV d~ 2 nm
Examples:: MOS structure (MOSFET) GaAs/Ga 1-x Al x As heterostructure
Molecular Beam Epitaxy:: Technique for growing semiconductor layered structure Allows Controlled growth of semiconductor layers with monolayer precision.
MBE:: Schematic of MBE Effusion Cells CAR assembly Cryopanels RHEED Gun
Classical Hall Effect(1879) Lorentz Force Law :: R h =E y /(J x B)=V y d/(BI x ) R h – Hall Coefficient d - thickness (along Z-axis) Drude Picture :: R h =-1/(ne) =>Hall Resistance R xy =-E y /J x =R h B B
QHE-Klaus von Klitzing (1980) Transverse resistance
Conclusions:: MBE provides a convenient way to prepare 2D electron system Ability to control band gap and grow one layer of semiconductor material at a time results in the possibility of development of electronic and optoelectronic devices