Nano-Electronics at DIEGM In collaboration with: EU projects: –NESTOR, SINANO, PULL-NANO Italian projects: –PRIN (2002, 2004, 2006) –FIRB –PNR
Nano-switches in SOI technology EU projects: NESTOR, SINANO
balistic and quasi-balistic transport Modeling of nano-devices
Design and Fabrication of nano-devices Ultra-thin body Silicon On Insulator nanotransistor EU projects: SINANO PULL-NANO single atoms SON MOSFET Si channel 20nm Buried dielectrics 20nm tox = 30 Å Si 3 N 4 SiO 2 Poly Si 80nm Si epi
Innovative Non Volatile Memories based on localized trapping
Electrical Device Characterization FILMATO MISURA ?
Italian Universities Nano-Electronics Team (IU.net) A new powerful university consortium to overcome the fragmentation of nano- electronics research in Italy
members Politecnico di Milano Università di Udine Università di Padova Università di Modena Università di Pisa Università di Ferrara Università di Roma La Sapienza Università di Bologna 30 staff members, approximately 30 PhD students