Spectroscopy FNI 1C

Spectroscopy Inputs Outputs e- γ A+ Sample FNI 1C

Probe: Electrons γ Sample e- e- Electrons Out Photons out Electrons In Auger electrons Secondary electron imaging Backscattered electron imaging Transmitted electrons Electron diffraction Probe: Electrons Photons out Energy Dispersive Spectroscopy Wavelength Dispersive Spectroscopy Electrons In e- e- γ Sample FNI 1C

Probe: Photons γ γ Sample e- Photons Out Photons In Electrons Out Fourier Transform Infrared Spectroscopy Raman Visible Ultraviolet X-Ray Fluorescence X-Ray Diffraction Photons In Infrared Visible Ultraviolet X-Rays Electrons Out XPS, X-ray Photoelectron Spectroscopy γ γ e- Sample FNI 1C

Probe: Ions Sample A+ A+ Ions Out Ions In SIMS, Secondary Ion Mass Spectrometry ToF SIMS, Time of Flight SIMS, ICP MS, Inductively Coupled Plasma Mass Spectrometry Ions In A+ A+ Sample FNI 1C

X-Ray Tools X-Ray Spectroscopy X-ray fluorescence (XRF) Energy Dispersive X-ray Spectroscopy (EDS) Wavelength Dispersive X-ray Spectroscopy (WDS) X-ray fluorescence (XRF) X-ray photoelectron spectroscopy (XPS) X-Ray Diffraction FNI 1C

Energy Dispersive X-Ray Spectroscopy, EDS Element maps Spectra Applications System overview System image X-Ray detector FNI 1C

EDS Applications Used to determine the elemental composition of a sample. Can perform both qualitative (What is it?) and quantitative (How much?) analysis. Depending on the window low atomic number elements may not be visible. Super ultra thin windows detect down to berilium. Older detectors may only detect fluorine and higher. Window less detectors are available. FNI 1C

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EDS Element Map FNI 1C

EDS Image FNI 1C

Energy Dispersive X-Ray Detector System FNI 1C

Solid state Si Li X-Ray Detector FNI 1C

Example of Electron Transitions FNI 1C

Vendors EDAX Princeton Gamma Tech Noran/Kevex/Thermo http://www.edax.com/index.html Princeton Gamma Tech http://www.pgt.com/ Noran/Kevex/Thermo http://www.thermo.com/BURedirect/welcomeMsg/1,5107,28,00.html Oxford Instruments http://www.oxinst.com/ FNI 1C

Wavelength Dispersive X-Ray Spectroscopy, WDS System Overview Detector Image FNI 1C

WDS System FNI 1C

WDS Detector P10 gas is 90% argon and 10% methane FNI 1C

Image of WDS Detector FNI 1C

Wavelength Dispersive X-Ray Spectroscopy System Overview Detector Image FNI 1C

Other X-Ray Analysis X-Ray Photoelectron Spectroscopy (XPS) X-Ray Tomography Nano CT XRD X-Ray Diffraction FNI 1C

X-Ray Photoelectron Spectroscopy An incoming X-Ray removes a core electron which will have a characteristic energy based on the difference between the initial X-Ray energy, which is of known energy, and the energy to remove the inner electron from the atom, which is characteristic. This has very high sensitivity. FNI 1C

Links http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/hydazi.html#c3 http://elchem.kaist.ac.kr/vt/chem-ed/analytic/ac-meths.htm http://elchem.kaist.ac.kr/vt/chem-ed/scidex.htm http://www.nanopicoftheday.org/ http://www.physics.berkeley.edu/research/crommie/index.html FNI 1C

Quantum Numbers Number Name Permitted Values Defines n Principal (1, 2, 3, …) Electron shell (1=K, 2=L, 3=M …) l Azimuthal 0 to n-1 Electron cloud shape m Magnetic -l to +l Electron shell orientation in a magnetic field s Spin ±½ Electron spin direction j Inner precession l±½ But j≠-½ Total angular momentum FNI 1C

Electron Shells K LI LII LIII MI MII MIII MIV MV n 1 2 3 l s +½ -½ j ½ s +½ -½ j ½ 1½ 2½ FNI 1C

Electron Transitions The change in n must be ≥ 1 (Δn ≠ 0) The change in l can only be ±1 The change in j can only be ±1 or 0 FNI 1C

Other Surface Analysis Methods Focused ion beam (FIB) Mass spectrometry/Residual gas analyzer (Mass spec/RGA) Secondary ion mass spectrometry (SIMS) Time of Flight SIMS (ToF SIMS) Atom probe microscopy Auger electron spectroscopy (Auger or AES) Rutherford Backscattering Spectroscopy (RBS) Fourier transform infrared spectroscopy (FTIR) Raman spectroscopy FNI 1C

Mass Spectrometry, Mass Spec Residual Gas Analyzer, RGA Sorts atoms, molecules and molecule fragments based on mass. http://elchem.kaist.ac.kr/vt/chem-ed/ms/ms-intro.htm http://elchem.kaist.ac.kr/vt/chem-ed/ms/mag-sect.htm http://elchem.kaist.ac.kr/vt/chem-ed/ms/quadrupo.htm http://elchem.kaist.ac.kr/vt/chem-ed/ms/tof.htm FNI 1C

Secondary Ion Mass Spectrometry http://www.eaglabs.com/cai/simstheo/caistheo.htm http://www.eaglabs.com/cai/simstheo/ionsput.htm http://www.eaglabs.com/tutorial.htm FNI 1C

SIMS FNI 1C

ToF SIMS ToF SIMS http://www.phi.com/genf.asp_Q_ID_E_283 FNI 1C

Atom Probe Microscopes http://www.ornl.gov/info/ornlreview/rev28-4/text/atoms.htm Imago Scientific Instruments http://www.imago.com/imago/ FNI 1C

Imago 3D Atom Probe Microscope FNI 1C

Imago LEAP FNI 1C

Auger Electron Spectroscopy AES http://www.eaglabs.com/cai/augtheo/process.htm AES has a number of advantages over X-Ray analysis. It can be confined confined to a very small spot. Signals are generated only from a very shallow depth into the sample (3 nm). It can be combined with an ion mill to create a very detailed analysis of bulk materials. Intermediate in price between SEM/EDS and more expensive systems. FNI 1C

Rutherford Backscattering Spectroscopy, RBS http://www.eaglabs.com/cai/rbstheo/intro.htm Uses alpha particles (He++) to analyze a material. FNI 1C

Fourier Transform Infrared Spectroscopy FTIR Uses Infra-Red EM radiation to analyze molecules, especially organic compounds. Bending, stretching, rotation Infrared light of different energies is passed through the sample. How the sample absorbs light is analyzed. http://www.forumsci.co.il/HPLC/FTIR_page.html http://mmrc.caltech.edu/FTIR/FTIRintro.pdf FNI 1C

Raman Spectroscopy A change in polarizability of the molecule results in a shift in frequency of a laser. http://carbon.cudenver.edu/public/chemistry/classes/chem4538/raman.htm FNI 1C

Focused Ion Beam FIB This method uses a beam of ions and magnetic lenses to focus the ions onto the sample. FIB is used to drill tiny holes in a sample. This is usually used to see the cross sectional structure of the device. http://dsa.dimes.tudelft.nl/usage/technology/FIB/ http://mfgshop.sandia.gov/1400_ext_IonBeam.htm http://www.nanopicoftheday.org/2003Pics/FIBNanofab.htm FNI 1C

Example of FIB FNI 1C

FIB Preparation for TEM FNI 1C

FIB Links http://www.ipr.umd.edu/ionbeam/ast-fib.html http://cmm.mrl.uiuc.edu/techniques/fib.htm FNI 1C

Links http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/hydazi.html#c3 http://elchem.kaist.ac.kr/vt/chem-ed/analytic/ac-meths.htm http://elchem.kaist.ac.kr/vt/chem-ed/scidex.htm http://www.nanopicoftheday.org/ FNI 1C

Other Surface Analysis Methods Focused ion beam (FIB) Mass spectrometry/Residual gas analyzer (Mass spec/RGA) Secondary ion mass spectrometry (SIMS) Time of Flight SIMS (ToF SIMS) Atom probe microscopy Auger electron spectroscopy (Auger or AES) Rutherford Backscattering Spectroscopy (RBS) Fourier transform infrared spectroscopy (FTIR) Raman spectroscopy FNI 1C