Scanning Probe Lithography

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Presentation transcript:

Scanning Probe Lithography Yongshik Park February 13th, 2008 EE C235/NSE C203

Outline Scanned Probe Oxidation Generating an Polymer “Resist” Layer using Scanning Probe Lithography High-Field Scanning Probe Lithography in Hexadecane Cons and Pros Conclusions

Scanned Probe Oxidation Began at NIST in 1989 Electrical bias between a conducting tip and a substrate induces a highly localized enhanced oxidation. Typical line width: 10~20nm J. A. Dagata, Science, Vol. 270, 1995, pp1625-1626

Scanned Probe Oxidation- Applications Fabrication of single tunneling transistor(SET) Fabrication of Si nanowire J. A. Dagata, Science, Vol. 270, 1995, pp1625-1626

Generating an Etch Resistant “Resist” Layer from Common Solvents Fluid Cell DC Bias Solvent vapor An organic electrolyte replaces water to generate an organic resist. Scan rate: 10um~20um I. Suez, S. Backer, J. Frechet, Nano Letter, Vol. 5, No. 2, 2005, pp321-324

Generating an Etch Resistant “Resist” Layer from Common Solvents After generating n-octane patterns After etching The height of n-octane: 2.5nm (40% higher than the case of water) After etching, the height of step: 8.5nm I. Suez, S. Backer, J. Frechet, Nano Letter, Vol. 5, No. 2, 2005, pp321-324

High-Field Scanning Probe Lithography in Hexadecane - Hydrophobocity Surface hydrophobocity determines the deposited material. Hydrophilic  SiO2 Hydrophobic  n-octane Oxidation of the silicon surface occurs in the meniscus formed by the water dissolved in the fluid, with minimal effects on the reaction from the surrounding solvents I. Suez, M. Rolandi, S. Backer, A. Scholl, J. Frechet, Advanced Materials, Vol. 19, 2007, pp3570-3573

High-Field Scanning Probe Lithography in Hexadecane - Hydrophobocity After deposition(black) After etching(red) On Hydrophilic surface On Hydrophobic surface Etching makes trenches on hydrophilic surface and tall posts on hydrophobic surface. I. Suez, M. Rolandi, S. Backer, A. Scholl, J. Frechet, Advanced Materials, Vol. 19, 2007, pp3570-3573

High-Field Scanning Probe Lithography in Hexadecane – PEEM analysis AFM image Carbon signal PEEM PEEM analysis Although there are only small differences in features of the local spectra, carbon content information was obtained 1st and 2nd peak: C=C double bond 3rd peak: hybridized carbon atoms I. Suez, M. Rolandi, S. Backer, A. Scholl, J. Frechet, Advanced Materials, Vol. 19, 2007, pp3570-3573

Cons and Pros Cons Can make nano patterns without optical apparatus Can control deposited material by hydrophobocity of the surface Can make arbitrary patterns by controlling the trajectory of AFM tip Pros Low throughput: serial scan and low speed Multiple tips Small scan area

Conclusions Scanning probe oxidation can make nanowire, SET, etc. By using an organic solvent, the organic material can be deposited on the surface. The hydrophobocity determines the deposited material Hydrophilic surface  SiO2 Hydrophobic surface  hydrocarbon By PEEM analysis, the deposited material on the hydrophobic surface has carbon components.