©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Tristan O. Rocheleau Advisor: Prof. Clark T.-C. Nguyen RF MEMS: Enabling the.

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©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Tristan O. Rocheleau Advisor: Prof. Clark T.-C. Nguyen RF MEMS: Enabling the Next Generation of Wireless Communications

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Conformal Photovoltaics Magnetic Immunosensor Smart Dust Nanocavity LEDs Optical Interconnects Nanocomposite Energy Harvesting & Storage Harsh Environment Sensing Electrospun Active Fabrics Cell Culture Array MEMS RF Multiband Frontend Large Area Nanostructural Printed Electronics BSAC Research Areas

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Quartz Resonators: They’re Everywhere 3mm

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Next-Gen Devices Must Do Everything Each additional radio channel requires more filters, oscillator -> more bulky resonators(space and $$)

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Enter RF-MEMS Vs. 30µm

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Capacitive-Gap MEMS Resonators vivi VPVP i out 30µm Tiny! May be integrated on-chip Capable of extremely high Q

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Fabricated Device Drive Electrode Sense Electrode Anchor Stem 1µm

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 MEMS-Based Oscillator t MEMS resonator acts as frequency feedback element in oscillator

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 RQRQ vivi RQRQ vovo Electro-mechanical Coupling Resonator Tank Coupling Beam RdRd MEMS-Based Filter

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 BSAC Posters in Cory Hall

©2012 University of CaliforniaBerkeley Sensor & Actuator Center Fall 2011 Poster Session Location: 4 th Floor Cory Hall Conference RoomSwarm Lab