22/01/2014I° microEO meeting1 MICRO-COOLING CONNECTORS

22/01/2014I° microEO meeting2 STANDARD PEEK CONNECTORS - IDEX - NanoPorts Gluing to silicon surface: -with glue ring standard from IDEX -with Araldite 2020 or Araldite 2012 Leak tightness made from a plastic o-ring

22/01/2014I° microEO meeting3 Gluing problems! In vacuum vessel at night: Gluing to hold high CO2 pressure

22/01/2014I° microEO meeting4 RAPHAEL DESIGN CONNECTOR – for CO2 high pressure - Used with snake 1 prototype (2.5mm thickness) - Copied for the ATLAS micro-channel design  used for pressure tests with Si-Pyrex

22/01/2014I° microEO meeting5 SOLDERING CONNECTORS – Ferrules - Based on the paper: ‘Solder-based chip-to-tube and chip-to-chip packaging for microfluidic devices Edward R. Murphy et al., The Royal Society of Chemistry, 2007’ - First trials with Swagelok ferrules Stainless steel ferrule Brass ferrule Stainless steel tube Silicon plate Solder 1/16’’ tubeStainless steel ferrule Brass ferrule Tested up to 250 bar!!!

22/01/2014I° microEO meeting6 SOLDERING CONNECTORS – KOVAR inserts -KOVAR: FeNiCo alloy with a CTE coefficient comparable with the CTE of silicon (~ /K) in order to avoid mechanical stresses due to temperature gradients -Kovar inserts and stainless steel tubes Cu plated -Soldering in vacuum oven at 200°C Au 100nm Ni 350nm Ti 200nm A.Mapelli Kovar SnPb 0.1 mm Foil Silicon Cu Plating Tested up to 700 bar!!! Stainless steel tube ( Ø1.6mm)

22/01/2014I° microEO meeting7 - ‘Lamage’ in KOVAR to perform the soldering with the tube - X-ray picture of the interface: small voids! Silicon Kovar-Si interface Solder Small voids

22/01/2014I° microEO meeting8 Masks used to pattern the silicon metalization! Soldered samples embedded in resin and polished  pictures of the hole Optimized connector for material budget reduction

22/01/2014I° microEO meeting9 KOVAR connectors for the new LHCb Snake prototype

22/01/2014I° microEO meeting10 LATEST IDEA (from yesterday!) – NA62 project - Small Kovar insert with a through hole and bending of the tube! Au 100nm Ni 350nm Ti 200nm A.Mapelli Kovar SnPb 0.1 mm Foil Silicon Cu Plating Stainless steel tube ( Ø1.6mm)