Scanning electron microscopy Katedra experimentálnej fyziky FMFI UK B r a t i s l a v a.

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Presentation transcript:

Scanning electron microscopy Katedra experimentálnej fyziky FMFI UK B r a t i s l a v a

History Discovery of the electron ( J. J. Thompson) Particle and wave theory (L. deBroglie) Electromagnetic lens (H. Busch) Demonstration of electron diffraction (C. J. Davisson and L. H. Germer) Theoretical description of SEM (H. Stintzing) Construction of first electron microscope (transmission) (M. Knoll and E. Ruska) Demonstration of scanning electron microscope theory (M. Knoll) First SEM constructed (M. von Ardenne) First commercial transmission electron microscope (B. von Borries and E. Ruska)

History Production of electrostatic lens SEM (V. K. Zworykin, J. Hillier and R. L. Synder) Production of electromagnetic lens SEM (K. C. A. Smith) X-ray microanalyzer with a scanning probe (V. E. Cosslett and P. Duncomb) Improved secondary electron detector (T. E. Everhart and R. F. M. Thornley) 1960's - First commercial SEM (Cambridge Instrument Co., Ltd.) Construction of a STEM with a field emission source (A. V. Crewe and J. Wall)

Physics Electron interaction with sample Electron energy spectrum Electron – core electron interaction

Electron interaction with sample

Electron energy spectrum

Electron – core electron interaction

Technics Vacuum chamber Electron optics Image formation Electronics

Tubus VEGA

Electron gun

Cathode

Electromagnetic lens

Detectors

Image formation

Image modes

SEM – VEGA TS5136MM

Image Gallery Poppy seed

Image Gallery Leaf of nettle with beetle

Image Gallery Fly head

Image Gallery Ant head

Image Gallery Ant feeler