Meso Machining Norman Salmon Engineering Program Manager Lawrence Berkeley National Lab njsalmon@lbl.gov

Meso-scale machining: 10 µm ~ 1mm bridging the gap between silicon based MEMS and conventional miniature machining. meso machining miniature machining silicon µ-machining 10-3 10-4 10-5 10-6 [m] Critical dimensions

Micro Milling, Drilling and Turning Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002 100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair

Micro Engine Components 1mm Micro Rotor Micro Turbine 1mm 1mm

Electroplated RF Electrode 125 micron

Meso-Machining Examples FIB Milling 37µm cutting tool 10µm gears on silicon 25µm channel on diamond 39µm channel on graphite

Micro Tooling tooling design tooling application materials Diamond tools cut by FIB New workpiece materials analysis of cutting performance Force sensing (MEMS) Acoustic emissions 25 micron End Mill 10 micron End Mill

LBL - MESO Machining Lab Long Term Vision Micro Turning Micro EDM Laser Cutting and Welding Micro Milling LBL - MESO Machining Lab AFM Nano- Machining LIGA Micro Molding & Casting FIB Micro Wire EDM

Micro Manipulation Stage for Lift-Out Specimen Preparation with FIB

Nano-Manipulator for the Molecular Foundry 120mm x y z

Micro Assembly Station MEMS Grippers Gripper Changer Nanometer resolution Haptic Feedback?

Meso machine tool with in situ metrology High Speed 170K RPM Hydrostatic Spindle Sub-Micron Accuracy Integrated CMM Probing, Laser, and Capacitance Inspection

Objectives Develop Leading Technology Program in Meso Machining, Assembly, and Metrology Develop Partnerships and Collaborative efforts that support and compliment our Technology