Optics in micromanufacturing Prof. Yong-Gu Lee Phone: Course web site: Password for protected zip files: xxxx 1

Motivation Silicon manufacturing was a great success leading to integrated circuits, sensors (ex: gyroscopes, accelerometers), actuators (ex: DMD) Normally, manufacturing is done in batch processes without visual monitoring Optics allows real time monitoring of objects comparable to the wavelength of light (400nm~800nm) Sophisticated sensing, manipulation and manufacturing can be realized using optics 2

Micromanufacturing, micromanipulation and sensing 3 Sun et al, Elastic force analysis of functional polymer submicron oscillators, Appl. Phys. Lett. 79, 3173 (2001);

Course Outline Optics is an important subject in manufacturing micrometer scale devices and sensors. The goal of this course is to learn practices and the theory of optics used in micromanufacturing. Firstly, microscopy is covered as it is the basic tool used in examining micromanufacturing processes. Secondly, actuated stages and cameras used in advanced microscopes are covered. Thirdly, techniques for introducing lasers into microscopes and steering the laser and measuring the scattering of laser from particles are covered. Lastly, applications that utilize the instruments and theory covered in the courses are covered that include optical tweezers and microsterolithography. Special emphasis will be given to optical tweezers theory and understanding the underlying physics. Advanced research topic of single molecule trapping using optics tweezers will also be covered. 4

Course focus Light microscopy (1 week) –Brightfield microscopy –Fluorescence microscopy Microscope stages (1 week) –Motorized stages –Piezo stages –Linear displacement sensors –SW control Microscope image acquisition (1 week) –CCD, CMOS cameras –SW control Laser steering in microscope (1 week) –Laser safety –Tilt mirrors –Spatial light modulators –SW control Laser scattering in microscope (2 weeks) –Theory –Quadrant Photo Diodes –SW control Force measurements (2 weeks) –Particle tracking –Optical Tweezers and Trap stiffness –Fluid force calculation using FEM methods Mid term examination (1 week) Microstereolithorgraphy (1 week) Optical force calculations (2 weeks) –Ray-optics model –Rayleigh regime –Numerical methods (FDTD) Single molecule trapping (3 weeks) –Plasmonic tweezer –Introduction to DNA –DNA trapping –DNA sorting Final examination (1 week) 5

Syllabus 6 Weekly Course Schedule CalendarDescription Remarks 1 st week Introduction, light microscopy 2 nd weekMotorized stages, Piezo stages 3 rd week Microscope image acuistion (CCD cameras/CMOS ca meras) 4 th weekLaser steering with tilt mirrors 5 th weekLaser steering with spatial light modulators 6 th weekLaser scattering measurements 7th weekForce measurements 8 th weekMid term examination 9 th weekMicrostereolithography 10 th weekOptical Tweezers (Ray-optics model) 11 th week Optical Tweezers (Rayleigh regime, numerical method s (FDTD)) 12 th week Plasmonic tweezers Term project proposal due 13 th week Introduction to DNA processing 14 th week DNA trapping and sorting Term project progress report 15 th weekFinal exam 16 th weekTerm project presentation

Understandings Grades Assignments10 Term project30 Mid exam20 Final exam30 Class attendance10 _____________________ 100 A,B,C,F A~40% B~40% C,F~20% *Subject to change If you fail to attend more than 1/3 of the classes, you disqualify for taking any examinations further scheduled. Regulations on Courses, ART 25 (3) 7

Understandings Attendance –No excuses for absence Business trip Sick –Attendance credit Not to be later than 15 minutes No early leave Assignments –Penalties for late submissions –No credit for copied submissions, (original and copies) 8