（ Transmission Electron Microscopy ： TEM ） 穿透式電子顯微鏡 Advisor: Kuen-Hsien, Wu Student: Jyun-Li, Wu 1

Outline Introduction Principle Application Comparison Conclusion Reference 2

Introduction 3

1924 Louis de Broglie 1926 Hans Busch 1931 Ernst Ruska

Principle 規格： （ 1 ）電子源：熱陰極電子鎗（鎢絲或是 LaB6 燈絲） （ 2 ）最大加速電壓： 120KV （ 3 ）倍率：最低 50x ，最高 600,000x （ 4 ）傾斜角度：正負 30 度 圖片來源 : 南台科技大學 5

Principle Vacuum System ： To increase the mean free path of the electron gas interaction for the voltage difference between the cathode and the ground without generating an arc. Electromagnetic Lens System ： A series of electromagnetic lenses and apertures are used to reduce the diameter of the source of electrons and to place a small, focused beam of electrons onto the specimen. Sample Holder ： TEM specimen stage designs include airlocks to allow for insertion of the specimen holder into the vacuum with minimal increase in pressure in other areas of the microscope. Imaging System ： Imaging methods in TEM utilize the information contained in the electron waves exiting from the sample to form an image. 6

Principle S ＝ 0.61λ/NA λ ＝ h / p LaB6 圖片來源： 7

Principle 圖片來源： 8

Principle Elastic Scattering Inelastic scattering Back-scattered Electron 圖片來源： 9

Analysis of material contain : Application  Material morphology  Material defects  Chemical composition  Crystallographic structure  Extremely high resolution images 10

Application Epitaxy structure Polycrystalline silicon 圖片來源： %AE%E9%8F%A1TEM.pdf %AE%E9%8F%A1TEM.pdf 11

Application Bright field image Dark field image 圖片來源： %AE%E9%8F%A1TEM.pdf %AE%E9%8F%A1TEM.pdf 12

Application BFI of particle in Al-Cu alloy DFI selected to show the particle seen on their side DFI showing the conspicuous close to vertical particle 圖片來源： %AE%E9%8F%A1TEM.pdf %AE%E9%8F%A1TEM.pdf 13

Application Three-dimensional image 14

15 Application 南台科技大學 - 奈米科技研究中心： JEOL JEM 穿透式電子 顯微鏡 (120 kV TEM)TEM 影像分析 1000 元 / 小時 學校單位 1500 元 / 小時 研究單位 2000 元 / 小時 營利事業單位 成功大學 - 微奈米科技研究中心 ：高解析場發射掃描穿透式電子顯微鏡 (High-Resolution Transmission Electron Microscopy ; HR-TEM) 680 自行操作 / 小時 1800 代工學界 / 小時 3600 代工業界 / 小時

Comparison SEM : 1.Samples must be conductive. 2.Samples can not be a powder or a volatile items. 3.The scattered electrons in SEM are backscattered or secondary electrons. 4.SEM has only 0.4 nanometers. TEM : 1.Samples must be conductive. 2.TEM sample need to prepare for thickness. 3.Using elastic scattering and inelastic scattering for image. 4.The resolution of TEM is 0.5 angstroms. 5.Specimen size must be under 3mm. 圖片來源：

Because of TEM analysis would be broken the sample, so we should consider what formation we can obtain in TEM, but TEM can provide high resolution better than SEM. Both SEM and TEM are two types of electron microscopes and are tools to view and examine small samples. 17 Conclusion

roscopy roscopy between-tem-and-sem/ between-tem-and-sem/ 18 Reference

19 Thanks for your attention