Furnaces and wet benches Savitha P. Annealsys new RTP: facilities hook up over, waiting for gases hook up, what about the pump? K-space Ultra scan:

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Furnaces and wet benches Savitha P

Annealsys new RTP: facilities hook up over, waiting for gases hook up, what about the pump? K-space Ultra scan: Basic training over – Rough comparison with Dektak XTA, results similar – Need some software patches to be fixed Need to schedule annual maintenance for the furnace – One week each for LPCVD and atmospheric furnaces – Plan includes dismantling/cleaning of tubes, PCW lines gas injectors and scrubbers Problems with new material entry – Protocol for bringing in substrates other than Si and glass? No information on order status/delivery with MITO076 Furnaces & Wet benches - update

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