Furnaces and wet benches Savitha P. TEOS installed – problems stabilizing temperature and pressure Solved with First Nano’s help – Under optimization.

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Presentation transcript:

Furnaces and wet benches Savitha P

TEOS installed – problems stabilizing temperature and pressure Solved with First Nano’s help – Under optimization Status of new equipments – Idonus HF vapouriser: Open for user training – AS one 150 RTP: Under installation – Ultrascan wafer curvature measurement: tool arrived Tool distribution – First Nano furnaces (10 tubes) + Tempress (2 tubes) + RTP (2) + IV-CV + Four probe+ Dektak + maintenance : Raghu, Madhuri & Mirji – Wet benches (8) + HF vapouriser + Chemical storage: Deepa and Ujwala – CPD + Electroplating + ALD : Advaitha Furnaces & Wet benches - update

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