Furnaces and wet benches Savitha P. Annealsys new RTP: Pump quote, hook up quote in process, time for spare parts Visit to SITAR regarding TEOS deposition.

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Presentation transcript:

Furnaces and wet benches Savitha P

Annealsys new RTP: Pump quote, hook up quote in process, time for spare parts Visit to SITAR regarding TEOS deposition – Wrong bubbler? – Check for connections for the glass bubblers ordered from AIR products initially HF vapouriser moved into its own wet bench with a connection to HF drain Planning for biannual furnace shutdown in Jan 2015 Furnaces & Wet benches - update

Shipment problem Summary of the shipment Arrival from CVD: 22 nd August 2014 Documents received from CVD and send to Mr.Badrinath: Sept 3 rd Clarification asked and provided: Sept 10 th Reminders from TNT: From Sept 22 nd to Oct 10 th – 5 times (Badrinath orally responds to us saying documents were sent: the corresponding file shows documents sent on 20 th Sept) All documents scanned and sent again from CENSE, received by TNT: 15 th Oct Shipment cleared from customs: 25 th Oct 2014 Shipment delivery: Unclear Huge amount of demurrage charges being paid, this is true for almost every shipment.

Thank you