NATIONAL NANOFABRICATION CENTRE CLEAN ROOM COMMITTEE MEETING TUMS Murthy 26 July 2011

Central Equip & Process Support Utilities Maintenance Building and Infrastructure Shared with Nano Labs Administration Shared with Nano Labs Engrs – 3 Arun Kumar Anand,Prakash, Thyagananand Engr- 1 Operators- 8 Vacancies: : Supervisor – 1 Operators - 4 CEN Management Electronics & Hardware Maint Software Systems Maint Vacuum Systems Maint : Bldg, and common utilities Safety & Security House-keeping Purchasing, Stores & Inventory Control Budget Control HR & Secretarial assistance Electrical Systems Gases & Chem. Mgmt Mech. Systems BMS (FMCS) NanoFab Management (See next slide) Organization

Dr.Savitha Thermal Processing Dry & Plasma processing Thin films Litho and metrology Characterization ALD RTP Raith e-Line Laser Writer EVG Aligner & Bonder Radha Suman Veda Siva Vacancies: 1 Sangeeth Vijay Montero Pavandeep Srinivas- Evening shift Vacancy- 1 2 RF sputter e-Beam evaporator PECVD Sabiha Vamsi Smitha Nair Somya Pavithra Vacancy- 1 1 DRIE 2 ICP RIE Metrology Equipments Coat & develop CPD Wet Chemistry Dr.Hegde Dr.Raghavan Dr.Mishra Wet Chemistry & Plating Atmospheric and LPCVD Santosh Manikant Suman Vacancy –1 Material Characterization Electrical Characterization Chemical Mgmt ETP DI Water, Safety Gas management Exhaust Scrubbers HVAC + PCW CDA+ Vacuum Raw Water, Fire serv. Electrical BMS

TUMS MurthyCleanroom Committee Meeting26 July 2011 Policies and Procedures  Procedure to gain access to the Cleanroom in place  Procedure to become an independent user in place  Cleanroom protocol and Dos and Don’ts published  Safety Manual and Emergency Response protocols under preparation  Equipment  Operating procedures ( done for existing equipment )  Logbook for each equipment  Preventive Maintenance procedures  Stock Critical Spares and PM kits  Consumables stocking plans

TUMS MurthyCleanroom Committee Meeting26 July 2011 Procedure to become an independent user Training by equipment owners Certification by equipment owners Frequency of use > 4 times/week Retraining and certification by equipment owners Request by User or Nominated by Faculty NoYes The training will be for a period of 1 to 2 weeks User clears the test Becomes an independent user Yes No Yes No

TUMS MurthyCleanroom Committee Meeting26 July 2011 Understand the Cleanroom protocol by going through the links provided in the webpage Download the equipment usage authorization form from the link given in the page Fill the form and submit to CEN office Take the clean room protocol test User clears the test User is authorized to use Cleanroom equipments Reserve the equipments through the Reserve Equipment link in the CEN homepage User is not authorized to use Cleanroom equipments Open the CEN website and select User Information from the left menu Yes No Gaining Access to the Cleanroom

TUMS MurthyCleanroom Committee Meeting26 July 2011 Policies and procedures  Facilities  Checklist for each system (daily, weekly, monthly etc.)  Log of all significant events  Daily report  Preventive maintenance plans under preparation

TUMS MurthyCleanroom Committee Meeting26 July 2011 Daily Report

TUMS MurthyCleanroom Committee Meeting26 July 2011 Facilities Checklist

TUMS MurthyCleanroom Committee Meeting26 July 2011 Major remaining works  Cleanroom qualification and handover  Finishing of Facilities and Infrastructure( BMS, Vesda, Fire fighting, Access control, Security) and handover  Hook-up of equipments  Equipments already in clean room  Equipment yet to be received  Equipment to be moved from old clean room and other departments

TUMS MurthyCleanroom Committee Meeting26 July 2011 Proposed Hook up schedule

TUMS MurthyCleanroom Committee Meeting26 July 2011 Warehousing and Inventory Control  Coding process initiated and completed for currently used materials  Simple Inventory control software installed  Tasks remaining  Secure and safe store location  Appoint dedicated stores administrator  Set-up a process for total business process from Planning, Purchasing, Receiving to withdrawal by the user

Inflow Inventory monitoring System

TUMS MurthyCleanroom Committee Meeting26 July 2011 Inflow Inventory monitoring System

TUMS MurthyCleanroom Committee Meeting26 July 2011 Shopping List  Miscellaneous tools for Facilities maintenance  Additional Clean room Furniture  Fab Management Software  RTP System  Asher  Dektak profiler  Plating Bench  Stand alone Spin, Coat and develop systems for Litho area

TUMS MurthyCleanroom Committee Meeting26 July 2011